User contributions
Jump to navigation
Jump to search
- 12:22, 29 January 2019 diff hist +2 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) Tag: Visual edit
- 12:20, 29 January 2019 diff hist +2 Test Data of etching SiO2 with CHF3/CF4-ICP1 Tag: Visual edit
- 12:17, 29 January 2019 diff hist -5 ICP Etching Recipes →SiO2 Etching (Panasonic 1) Tag: Visual edit
- 12:16, 29 January 2019 diff hist +5 ICP Etching Recipes →SiO2 Etching (Panasonic 1) Tag: Visual edit
- 12:14, 29 January 2019 diff hist +63 Test Data of etching SiO2 with CHF3/CF4-ICP1 Tag: Visual edit
- 12:14, 29 January 2019 diff hist 0 N File:I11901.pdf current
- 12:09, 29 January 2019 diff hist +238 N Test Data of etching SiO2 with CHF3/CF4-ICP1 Created page with "{| class="wikitable" | colspan="5" |ICP#1: 0.5Pa, 50/900W, CHF3/CF4=10/30 sccm, time=210 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Averaged Si..." Tag: Visual edit
- 12:06, 29 January 2019 diff hist +45 ICP Etching Recipes →SiO2 Etching (Panasonic 1) Tag: Visual edit
- 11:57, 29 January 2019 diff hist 0 N File:I11902.pdf current
- 11:46, 29 January 2019 diff hist +87 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) Tag: Visual edit
- 11:45, 29 January 2019 diff hist -169 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) Tag: Visual edit
- 11:43, 29 January 2019 diff hist +82 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:40, 29 January 2019 diff hist +33 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:36, 29 January 2019 diff hist +244 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:30, 29 January 2019 diff hist -403 Test Data of etching SiO2 with CHF3/CF4 Blanked the page Tag: Visual edit
- 11:26, 29 January 2019 diff hist +40 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:22, 29 January 2019 diff hist 0 Test Data of etching SiO2 with CHF3/CF4 add a table Tag: Visual edit
- 11:19, 29 January 2019 diff hist +7 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:13, 29 January 2019 diff hist -45 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 11:11, 29 January 2019 diff hist +4 ICP Etching Recipes →SiO2 Etching (Panasonic 1) Tag: Visual edit
- 11:06, 29 January 2019 diff hist +113 ICP Etching Recipes →SiO2 Etching (Panasonic 1) Tag: Visual edit
- 10:47, 29 January 2019 diff hist -30 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I) Tag: Visual edit
- 10:47, 29 January 2019 diff hist +85 ICP Etching Recipes /* SiO2 Etching with ICP1 Tag: Visual edit
- 10:42, 29 January 2019 diff hist +87 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add a pic Tag: Visual edit
- 10:38, 29 January 2019 diff hist +2 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add a pic Tag: Visual edit
- 10:37, 29 January 2019 diff hist 0 N File:SiO2 Etch using ICP2 with O2-a.pdf current
- 10:37, 29 January 2019 diff hist +34 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) add data Tag: Visual edit
- 10:25, 29 January 2019 diff hist +4 Test Data of etching SiO2 with CHF3/CF4 add a new pic Tag: Visual edit
- 10:24, 29 January 2019 diff hist 0 N File:SiO2 Etch using ICP2-no O2-a.pdf current
- 10:16, 29 January 2019 diff hist +34 Test Data of etching SiO2 with CHF3/CF4 add data Tag: Visual edit
- 12:06, 11 December 2018 diff hist 0 InP Etch Rate and Selectivity (InP/SiO2)
- 12:05, 11 December 2018 diff hist 0 InP Etch Rate and Selectivity (InP/SiO2)
- 12:03, 11 December 2018 diff hist +77 N File:IP180805.pdf Created page with "thumb"
- 11:56, 11 December 2018 diff hist 0 N File:IP180909.pdf current
- 11:51, 11 December 2018 diff hist +38 InP Etch Rate and Selectivity (InP/SiO2)
- 16:16, 11 October 2018 diff hist +2 Lithography Recipes →Holography Recipes
- 16:15, 11 October 2018 diff hist 0 N File:Holography Process for 1D-lines and 2D-dots (ARC-11 & THMR-IP3600HP-D)-updated-8-13-2018-A.pdf current
- 08:37, 9 October 2018 diff hist +78 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 08:33, 9 October 2018 diff hist +41 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 08:30, 9 October 2018 diff hist -41 Test Data of etching SiO2 with CHF3/CF4 Tag: Visual edit
- 08:28, 9 October 2018 diff hist +80 Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) Tag: Visual edit
- 08:25, 9 October 2018 diff hist +250 N Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Fluorine etch of the underneath layer) Created page with "{| class="wikitable" | colspan="5" |ICP#2: 0.5Pa, 50/500W, CHF3/CF4/O2=35/5/10sccm, time=210 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Averaged..." Tag: Visual edit
- 08:23, 9 October 2018 diff hist +1 ICP Etching Recipes →SiO2 Etching (Panasonic 2) Tag: Visual edit
- 08:17, 9 October 2018 diff hist +109 ICP Etching Recipes →SiO2 Etching (Panasonic 2): change the data title Tag: Visual edit
- 08:13, 9 October 2018 diff hist -4 Test Data of etching SiO2 with CHF3/CF4 add a data table Tag: Visual edit
- 08:09, 9 October 2018 diff hist +249 Test Data of etching SiO2 with CHF3/CF4 add a data table Tag: Visual edit
- 16:17, 8 October 2018 diff hist +251 Test Data of etching SiO2 with CHF3/CF4/O2 add a table current Tag: Visual edit
- 16:15, 8 October 2018 diff hist -83 ICP Etching Recipes →SiO2 Etching (Panasonic 1) Tag: Visual edit
- 15:48, 8 October 2018 diff hist +40 N Test Data of etching SiO2 with CHF3/CF4 add a data file Tag: Visual edit
- 15:46, 8 October 2018 diff hist 0 N File:SiO2 Etch using ICP2-no O2.pdf