All public logs

Combined display of all available logs of UCSB Nanofab Wiki. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).

• 18:56, 9 June 2020 John d talk contribs uploaded a new version of File:SiO2 Etch, Ru HardMask - Fluorine ICP Etch Process - Ning Cao 2019-06.pdf (added TOC, minor formatting)
• 18:29, 9 June 2020 John d talk contribs uploaded File:SiO2 Etch, Ru HardMask - Fluorine ICP Etch Process - Ning Cao 2019-06.pdf (Procedure for SiO2 deep etching on Plasma-Therm SLR Fluorine Etcher, using Sputtered Ruthenium hardmask)
• 19:58, 30 May 2020 John d talk contribs uploaded File:ASML IQC Focus Mean Correction screenshot.jpg
• 04:27, 5 May 2020 John d talk contribs changed group membership for Nplaviola from administrator to administrator (temporary, until 04:27, 5 May 2021)
• 04:27, 5 May 2020 John d talk contribs changed group membership for Nplaviola from (none) to administrator (to edit CSS style info)
• 19:26, 22 April 2020 John d talk contribs uploaded File:UCSB Service Agreement.pdf (UCSB Service Agreement, for Remote Fabrication Services section of Nanotech website.)
• 17:34, 10 April 2020 John d talk contribs deleted page COVID RSS (tested - not useful)
• 21:53, 26 March 2020 John d talk contribs uploaded File:ASML Reticle Programming Params - DEM-2020-03 v1.xlsx (CAD Tutorial - example programming spreadsheet for ASML Stepper)
• 21:49, 26 March 2020 John d talk contribs deleted page File:CAD Tutorial - ASML Reticle Programming Params - DEMISJAN2020 v1.xlsx (wrong file name)
• 21:48, 26 March 2020 John d talk contribs uploaded File:Example Mask order form (UCSB ASML 5500) - DEM-2020-03.pdf (CAD Tutorial - Example Mask order form (UCSB ASML 5500) - DEM-2020-03)
• 21:47, 26 March 2020 John d talk contribs deleted page File:Example Mask order form (UCSB ASML 5500) - DemisDJohn Template.pdf (wrong name)
• 21:46, 26 March 2020 John d talk contribs uploaded File:Example Mask order form (UCSB ASML 5500) - DemisDJohn Template.pdf (CAD Tutorial - example order for for photomask manufacturer)
• 21:27, 26 March 2020 John d talk contribs uploaded File:DEMISJAN2020 - Reticle Layout v1.GDS (CAD Tutorial - final GDS CAD file for submission to phootmask manufacturer)
• 19:31, 26 March 2020 John d talk contribs uploaded File:CAD Tutorial - ASML Reticle Programming Params - DEMISJAN2020 v1.xlsx (CAD Tutorial - ASML Reticle Programming Params spreadsheet with coordinates)
• 19:25, 26 March 2020 John d talk contribs uploaded File:CAD Tutorial for ASML Reticle v1 - screenshot Device Layout cell.png
• 18:50, 26 March 2020 John d talk contribs uploaded File:CAD Tutorial for ASML Reticle v1.OAS (Mask layout CAD tutorial for ASML Stepper reticle)
• 21:27, 23 March 2020 John d talk contribs uploaded File:Editing Tutorials - List of Uploaded Files - click the file title to get file page.png
• 20:13, 17 March 2020 John d talk contribs uploaded File:Facility-Use-MOU---Intercampus-UC-User.pdf (Intercampus U.C. User - Facility Use Memorandum of Understanding, for "Getting Lab Access")
• 20:04, 17 March 2020 John d talk contribs uploaded File:UCSB-Facilities-Use-Blanket-Waiver.pdf (Facilities Use - Blanket Waiver for "Getting Lab Access")
• 20:03, 17 March 2020 John d talk contribs uploaded File:UCSB-Facilities-Use-Agreement.pdf (Facilities Use Agreement, for "Getting Lab Access")
• 19:59, 17 March 2020 John d talk contribs uploaded File:SampleCOI.pdf (Sample Certificate of Insurance, for "Getting Access to Lab")
• 19:51, 17 March 2020 John d talk contribs uploaded File:Nanofabrication Facility Project Description.xlsx (NanoFab Remote Work "Project Description Form". Remote work users must fill this out and email to the appropriate NanoFab staff.)
• 01:06, 29 January 2020 John d talk contribs uploaded File:Microscope Training - UScope F-stop example annotated 1000px.png
• 19:50, 3 December 2019 John d talk contribs uploaded File:Olympus - BHM Microscope - Instruction Manual.pdf (Instruction user Manual for Olympus BMH* microscopes, scanned at Nanofab)
• 19:47, 3 December 2019 John d talk contribs uploaded File:Microscope 01 Olympus BHMJL crop.png
• 08:43, 8 November 2019 John d talk contribs uploaded a new version of File:Digidat-Toppan Mask order form (UCSB ASML 5500).docx (added barcode in instructions)
• 08:37, 8 November 2019 John d talk contribs uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx (retry scrolling)
• 08:35, 8 November 2019 John d talk contribs uploaded a new version of File:ASML Reticle Programming Params - MyReticleBarCode v1.xlsx (scrolled properly, indicated scale of coordinates are 1x wafer-scale)
• 00:40, 12 October 2019 John d talk contribs uploaded File:Visual Editor - switch to source mode - pen button.png
• 00:32, 12 October 2019 John d talk contribs uploaded a new version of File:Editing Tutorials 4b- file info right click URL.png (cropped)
• 00:23, 12 October 2019 John d talk contribs uploaded File:Editing Tutorials - 5- insert link into page.png
• 00:21, 12 October 2019 John d talk contribs uploaded File:Editing Tutorials 4b- file info right click URL.png
• 00:20, 12 October 2019 John d talk contribs uploaded File:Editing Tutorials 3c- modifications etc..png
• 23:40, 8 October 2019 John d talk contribs uploaded File:Editing Tutorials - Upload PDF - 3b- filename descript upload button.png
• 23:36, 8 October 2019 John d talk contribs uploaded File:Editing Tutorials - Upload PDF - 2- choose file.png
• 23:35, 8 October 2019 John d talk contribs uploaded File:Editing Tutorials - Upload PDF - 1- upload file.png
• 19:11, 4 October 2019 John d talk contribs uploaded File:194 Ru Etch O2,Cl2.pdf (BillM - Pan2 Ru etch 2019-09-19)
• 18:59, 4 October 2019 John d talk contribs deleted page File:194 Ru Etch O2,Cl2.pdf (for tutorial)
• 18:58, 4 October 2019 John d talk contribs uploaded File:194 Ru Etch O2,Cl2.pdf (Pan2 Ru Etch (Bill Mitchell 2019-09-19))
• 16:39, 25 September 2019 John d talk contribs moved page Plamsa Clean (YES EcoClean) to Plasma Clean (YES EcoClean) without leaving a redirect (spelling)
• 18:24, 9 September 2019 John d talk contribs uploaded File:Annotated PR etch - Om1000 03 - ARC + Cl + PR etch v1.jpg
• 18:18, 9 September 2019 John d talk contribs uploaded File:ARC etch + Cr etch - UV6 at 2krpm (900nm) survived v2 - screenshot.jpg
• 05:30, 7 September 2019 John d talk contribs uploaded File:PMGI+UV6 lift-off SEM - 2017-06-30 DJ.png
• 22:35, 23 August 2019 John d talk contribs uploaded File:Demis UCSB-Photonics-Gif.gif
• 06:56, 12 June 2019 John d talk contribs uploaded File:Stepper 3 - FEM Matrix Schematic.png
• 06:55, 12 June 2019 John d talk contribs uploaded File:Stepper 3 - FEM Energy Meander Schematic.png
• 23:31, 11 June 2019 John d talk contribs uploaded a new version of File:Oven4.jpg (New HeraTherm oven photo)
• 18:01, 10 June 2019 John d talk contribs uploaded a new version of File:MicroscopeMeasurementTools - FIJI draw measurement - line.png (smaller cropped version of same image)
• 17:59, 10 June 2019 John d talk contribs uploaded File:FIJI MMT UCSB-Fork Choose Microscope Calibration drop down.png
• 17:49, 10 June 2019 John d talk contribs uploaded a new version of File:FIJI Install Directory - MacOS.png (annotated showing the MMT folder)