User contributions for Pakala

9 March 2022

• 17:3417:34, 9 March 2022 diff hist 0‎ N File:SiO2 Fl 04 CS 005.jpg ‎No edit summary current
• 17:3317:33, 9 March 2022 diff hist 0‎ N File:SiO2 FL 04 45D 001.jpg ‎No edit summary current

8 March 2022

• 19:0919:09, 8 March 2022 diff hist +212‎ m Test Data of etching SiO2 with CHF3/CF4 ‎ added entry to ICP2 historical data Tag: Visual edit
• 19:0919:09, 8 March 2022 diff hist 0‎ N File:ICP2 01 CS 007.jpg ‎No edit summary current
• 19:0819:08, 8 March 2022 diff hist 0‎ N File:ICP2 01 45D 002.jpg ‎No edit summary current
• 19:0519:05, 8 March 2022 diff hist +212‎ m Test Data of etching SiO2 with CHF3/CF4-ICP1 ‎ added entry to ICP1 historical data Tag: Visual edit
• 19:0419:04, 8 March 2022 diff hist 0‎ N File:ICP1 01 CS 003.jpg ‎No edit summary current
• 19:0419:04, 8 March 2022 diff hist 0‎ N File:ICP1 01 45D 001.jpg ‎No edit summary current
• 18:5618:56, 8 March 2022 diff hist +190‎ m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher ‎ added new entry + SEM into Fl etcher historical data Tag: Visual edit
• 18:5518:55, 8 March 2022 diff hist 0‎ N File:SiO2 Fl 03 CS 001.jpg ‎No edit summary current
• 18:5518:55, 8 March 2022 diff hist 0‎ N File:SiO2 Fl 03 45D 001.jpg ‎No edit summary current

2 March 2022

• 17:5917:59, 2 March 2022 diff hist +504‎ m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher ‎ Added SEMs and some notes to new etch cals done on FL etcher Tag: Visual edit
• 17:5717:57, 2 March 2022 diff hist 0‎ N File:SiO2 Fl 01 45D 002.jpg ‎No edit summary current
• 17:5517:55, 2 March 2022 diff hist 0‎ N File:SiO2 Fl 02 CS 001.jpg ‎No edit summary current
• 17:5517:55, 2 March 2022 diff hist 0‎ N File:SiO2 Fl 02 45D 001.jpg ‎No edit summary current

15 February 2022

• 15:3315:33, 15 February 2022 diff hist −15‎ m Oxford ICP Etcher - Process Control Data ‎ added new images Tag: Visual edit
• 15:3315:33, 15 February 2022 diff hist 0‎ N File:Oxford Cal 01 26 22 New002 CS 002.jpg ‎No edit summary current
• 15:3115:31, 15 February 2022 diff hist +109‎ m Oxford ICP Etcher - Process Control Data ‎ updated etch rates and selectivity Tag: Visual edit
• 15:1315:13, 15 February 2022 diff hist −79‎ m Oxford ICP Etcher - Process Control Data ‎ updated images Tag: Visual edit
• 15:1115:11, 15 February 2022 diff hist +88‎ m Oxford ICP Etcher - Process Control Data ‎ updated some images Tag: Visual edit
• 15:1015:10, 15 February 2022 diff hist 0‎ N File:Oxford Cal 01 26 22 031New CS 001.jpg ‎No edit summary current
• 15:0715:07, 15 February 2022 diff hist 0‎ N File:Oxford Cal 01 26 22 003New 45d 001.jpg ‎No edit summary current

8 February 2022

• 18:1118:11, 8 February 2022 diff hist +318‎ m Oxford ICP Etcher - Process Control Data ‎ Added etch rate as well as SEMs for 1x1cm pieces Tag: Visual edit
• 18:0918:09, 8 February 2022 diff hist 0‎ N File:Oxford Cal 1 26 22 003 CS007.jpg ‎No edit summary current
• 18:0518:05, 8 February 2022 diff hist 0‎ N File:Oxford Cal 1 26 22 001 CS 004.jpg ‎No edit summary current
• 18:0318:03, 8 February 2022 diff hist 0‎ N File:Oxford Cal 1 26 22 003 45D 002.jpg ‎No edit summary current
• 17:5917:59, 8 February 2022 diff hist 0‎ N File:Oxford Cal 1 26 22 001 45D 005.jpg ‎No edit summary current

1 February 2022

• 19:1019:10, 1 February 2022 diff hist +140‎ m Oxford ICP Etcher - Process Control Data ‎ added new data, also changed units from nm to um Tag: Visual edit
• 19:0919:09, 1 February 2022 diff hist 0‎ N File:Oxford Etch InP Cal SEM - quarter wafer - CS 005.jpg ‎No edit summary current
• 18:3618:36, 1 February 2022 diff hist +100‎ Oxford ICP Etcher - Process Control Data ‎ link to dummy image Tag: Visual edit
• 18:3518:35, 1 February 2022 diff hist 0‎ N File:Oxford InP Cal - SEM 45D 001.jpg ‎No edit summary current
• 18:3118:31, 1 February 2022 diff hist +57‎ m Oxford ICP Etcher - Process Control Data ‎ testing Tag: Visual edit
• 18:2918:29, 1 February 2022 diff hist +7‎ m Oxford ICP Etcher - Process Control Data ‎ added data Tag: Visual edit