User contributions for Pakala

14 April 2022

• 17:3017:30, 14 April 2022 diff hist 0‎ N File:ICP2 004 CS 003.jpg ‎No edit summary current
• 17:2917:29, 14 April 2022 diff hist 0‎ N File:ICP2 004 45D 001.jpg ‎No edit summary current
• 17:2617:26, 14 April 2022 diff hist +215‎ m Test Data of etching SiO2 with CHF3/CF4-ICP1 ‎ added entry in ICP1 cals Tag: Visual edit
• 17:2517:25, 14 April 2022 diff hist 0‎ N File:ICP1 004 CS 001.jpg ‎No edit summary current
• 17:2517:25, 14 April 2022 diff hist 0‎ N File:ICP1 004 45D 004.jpg ‎No edit summary current

13 April 2022

• 20:2220:22, 13 April 2022 diff hist −3‎ m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher ‎ made more recent cals on top for Fl Etcher Tag: Visual edit
• 20:2020:20, 13 April 2022 diff hist 0‎ m Oxford ICP Etcher - Process Control Data ‎ made more recent cals on top of table for Oxford Tag: Visual edit
• 20:1620:16, 13 April 2022 diff hist 0‎ m Test Data of etching SiO2 with CHF3/CF4 ‎ made more recent cals on top of table for ICP2 Tag: Visual edit
• 20:1420:14, 13 April 2022 diff hist +2‎ m Test Data of etching SiO2 with CHF3/CF4-ICP1 ‎ made more recent cals on top of table for iCP1 Tag: Visual edit

12 April 2022

• 18:1618:16, 12 April 2022 diff hist +17‎ m Oxford ICP Etcher - Process Control Data ‎ added comment Tag: Visual edit

31 March 2022

• 15:4615:46, 31 March 2022 diff hist +225‎ m Oxford ICP Etcher - Process Control Data ‎ added entry to oxford 60c cals Tag: Visual edit
• 15:4515:45, 31 March 2022 diff hist 0‎ N File:Oxford 60c 04 CS 004.jpg ‎No edit summary current
• 15:4415:44, 31 March 2022 diff hist 0‎ N File:Oxford 60c 04 45D 001.jpg ‎No edit summary current

30 March 2022

• 17:2917:29, 30 March 2022 diff hist +238‎ m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher ‎ added entry in Fl Etcher, added selectivity to recent Cals Tag: Visual edit
• 17:2617:26, 30 March 2022 diff hist 0‎ N File:SiO2 Fl 05 CS 002.jpg ‎No edit summary current
• 17:2517:25, 30 March 2022 diff hist 0‎ N File:SiO2 Fl 03 45D 002.jpg ‎No edit summary current
• 17:1617:16, 30 March 2022 diff hist +223‎ m Test Data of etching SiO2 with CHF3/CF4 ‎ added entry to ICP2, added selectivity for recent cals Tag: Visual edit
• 17:1617:16, 30 March 2022 diff hist 0‎ N File:ICP2 03 45D 002.jpg ‎No edit summary current
• 17:1517:15, 30 March 2022 diff hist 0‎ N File:ICP2 03 CS 003.jpg ‎No edit summary current
• 17:0917:09, 30 March 2022 diff hist +12‎ m Test Data of etching SiO2 with CHF3/CF4-ICP1 ‎ added selectivity to recent ICP1 cals Tag: Visual edit
• 17:0317:03, 30 March 2022 diff hist +212‎ m Test Data of etching SiO2 with CHF3/CF4-ICP1 ‎ added entry in ICP1 Tag: Visual edit
• 17:0217:02, 30 March 2022 diff hist 0‎ N File:ICP1 03 CS 005.jpg ‎No edit summary current
• 17:0117:01, 30 March 2022 diff hist 0‎ N File:ICP1 03 45D 002.jpg ‎No edit summary current

9 March 2022

• 17:4217:42, 9 March 2022 diff hist +210‎ m Test Data of etching SiO2 with CHF3/CF4 ‎ added entry to ICP2 historical data Tag: Visual edit
• 17:4217:42, 9 March 2022 diff hist 0‎ N File:ICP2 02 CS 004.jpg ‎No edit summary current
• 17:4117:41, 9 March 2022 diff hist 0‎ N File:ICP2 02 45D 001.jpg ‎No edit summary current
• 17:3917:39, 9 March 2022 diff hist +212‎ m Test Data of etching SiO2 with CHF3/CF4-ICP1 ‎ added entry to ICP1 historical data Tag: Visual edit
• 17:3817:38, 9 March 2022 diff hist 0‎ N File:ICP1 02 CS 002.jpg ‎No edit summary current
• 17:3817:38, 9 March 2022 diff hist 0‎ N File:ICP1 02 45D 001.jpg ‎No edit summary current
• 17:3517:35, 9 March 2022 diff hist +455‎ m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher ‎ added entry to Fl historical data (wiht new table for 90s cals) Tag: Visual edit
• 17:3417:34, 9 March 2022 diff hist 0‎ N File:SiO2 Fl 04 CS 005.jpg ‎No edit summary current
• 17:3317:33, 9 March 2022 diff hist 0‎ N File:SiO2 FL 04 45D 001.jpg ‎No edit summary current

8 March 2022

• 19:0919:09, 8 March 2022 diff hist +212‎ m Test Data of etching SiO2 with CHF3/CF4 ‎ added entry to ICP2 historical data Tag: Visual edit
• 19:0919:09, 8 March 2022 diff hist 0‎ N File:ICP2 01 CS 007.jpg ‎No edit summary current
• 19:0819:08, 8 March 2022 diff hist 0‎ N File:ICP2 01 45D 002.jpg ‎No edit summary current
• 19:0519:05, 8 March 2022 diff hist +212‎ m Test Data of etching SiO2 with CHF3/CF4-ICP1 ‎ added entry to ICP1 historical data Tag: Visual edit
• 19:0419:04, 8 March 2022 diff hist 0‎ N File:ICP1 01 CS 003.jpg ‎No edit summary current
• 19:0419:04, 8 March 2022 diff hist 0‎ N File:ICP1 01 45D 001.jpg ‎No edit summary current
• 18:5618:56, 8 March 2022 diff hist +190‎ m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher ‎ added new entry + SEM into Fl etcher historical data Tag: Visual edit
• 18:5518:55, 8 March 2022 diff hist 0‎ N File:SiO2 Fl 03 CS 001.jpg ‎No edit summary current
• 18:5518:55, 8 March 2022 diff hist 0‎ N File:SiO2 Fl 03 45D 001.jpg ‎No edit summary current

2 March 2022

• 17:5917:59, 2 March 2022 diff hist +504‎ m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher ‎ Added SEMs and some notes to new etch cals done on FL etcher Tag: Visual edit
• 17:5717:57, 2 March 2022 diff hist 0‎ N File:SiO2 Fl 01 45D 002.jpg ‎No edit summary current
• 17:5517:55, 2 March 2022 diff hist 0‎ N File:SiO2 Fl 02 CS 001.jpg ‎No edit summary current
• 17:5517:55, 2 March 2022 diff hist 0‎ N File:SiO2 Fl 02 45D 001.jpg ‎No edit summary current

15 February 2022

• 15:3315:33, 15 February 2022 diff hist −15‎ m Oxford ICP Etcher - Process Control Data ‎ added new images Tag: Visual edit
• 15:3315:33, 15 February 2022 diff hist 0‎ N File:Oxford Cal 01 26 22 New002 CS 002.jpg ‎No edit summary current
• 15:3115:31, 15 February 2022 diff hist +109‎ m Oxford ICP Etcher - Process Control Data ‎ updated etch rates and selectivity Tag: Visual edit
• 15:1315:13, 15 February 2022 diff hist −79‎ m Oxford ICP Etcher - Process Control Data ‎ updated images Tag: Visual edit
• 15:1115:11, 15 February 2022 diff hist +88‎ m Oxford ICP Etcher - Process Control Data ‎ updated some images Tag: Visual edit