User contributions for Pakala

21 April 2022

• 17:5617:56, 21 April 2022 diff hist 0‎ N File:ICP1 05 45D 001.jpg ‎No edit summary current

20 April 2022

• 18:3618:36, 20 April 2022 diff hist −19‎ m Unaxis VLR Etch - Process Control Data ‎ started to enter etch recipe in to cal table Tag: Visual edit
• 18:3418:34, 20 April 2022 diff hist +382‎ m Unaxis VLR Etch - Process Control Data ‎ added new entries for Unaxis cals Tag: Visual edit
• 18:3318:33, 20 April 2022 diff hist 0‎ N File:Unaxis 02 CS 002.jpg ‎No edit summary current
• 18:3018:30, 20 April 2022 diff hist 0‎ N File:Unaxis 02 CS 004.jpg ‎No edit summary current
• 18:3018:30, 20 April 2022 diff hist 0‎ N File:Unaxis 02 45D 002.jpg ‎No edit summary current
• 18:2918:29, 20 April 2022 diff hist 0‎ N File:Unaxis 01 45D 002.jpg ‎No edit summary current
• 18:2918:29, 20 April 2022 diff hist 0‎ N File:Unaxis 01 CS 001.jpg ‎No edit summary current
• 18:1918:19, 20 April 2022 diff hist +325‎ m Oxford ICP Etcher - Process Control Data ‎ added entry in Oxford 60c cals Tag: Visual edit
• 18:1718:17, 20 April 2022 diff hist 0‎ N File:Oxford 60c 06 45D 002.jpg ‎No edit summary current
• 18:1618:16, 20 April 2022 diff hist 0‎ N File:Oxford 60c 06 CS 005.jpg ‎No edit summary current
• 18:1418:14, 20 April 2022 diff hist −8‎ m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher ‎ new SEM on SiO2_Fl_03 Tag: Visual edit
• 18:1218:12, 20 April 2022 diff hist 0‎ N File:SiO2 Fl 03 CS 004.jpg ‎No edit summary current

19 April 2022

• 19:5819:58, 19 April 2022 diff hist +242‎ m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher ‎ added entry to Fl cals Tag: Visual edit
• 19:5619:56, 19 April 2022 diff hist 0‎ N File:SiO2 Fl 06 CS 002.jpg ‎No edit summary current
• 19:5619:56, 19 April 2022 diff hist 0‎ N File:SiO2 Fl 06 45D 002.jpg ‎No edit summary current
• 19:5219:52, 19 April 2022 diff hist +207‎ m Oxford ICP Etcher - Process Control Data ‎ added entry in Oxford, updated selectivity numbers Tag: Visual edit
• 19:4819:48, 19 April 2022 diff hist 0‎ N File:Oxford 60c 05 CS 002.jpg ‎No edit summary current
• 19:4819:48, 19 April 2022 diff hist 0‎ N File:Oxford 60c 05 45D 004.jpg ‎No edit summary current

14 April 2022

• 17:3217:32, 14 April 2022 diff hist +216‎ m Test Data of etching SiO2 with CHF3/CF4 ‎ added entry to ICP2 cals Tag: Visual edit
• 17:3017:30, 14 April 2022 diff hist 0‎ N File:ICP2 004 CS 003.jpg ‎No edit summary current
• 17:2917:29, 14 April 2022 diff hist 0‎ N File:ICP2 004 45D 001.jpg ‎No edit summary current
• 17:2617:26, 14 April 2022 diff hist +215‎ m Test Data of etching SiO2 with CHF3/CF4-ICP1 ‎ added entry in ICP1 cals Tag: Visual edit
• 17:2517:25, 14 April 2022 diff hist 0‎ N File:ICP1 004 CS 001.jpg ‎No edit summary current
• 17:2517:25, 14 April 2022 diff hist 0‎ N File:ICP1 004 45D 004.jpg ‎No edit summary current

13 April 2022

• 20:2220:22, 13 April 2022 diff hist −3‎ m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher ‎ made more recent cals on top for Fl Etcher Tag: Visual edit
• 20:2020:20, 13 April 2022 diff hist 0‎ m Oxford ICP Etcher - Process Control Data ‎ made more recent cals on top of table for Oxford Tag: Visual edit
• 20:1620:16, 13 April 2022 diff hist 0‎ m Test Data of etching SiO2 with CHF3/CF4 ‎ made more recent cals on top of table for ICP2 Tag: Visual edit
• 20:1420:14, 13 April 2022 diff hist +2‎ m Test Data of etching SiO2 with CHF3/CF4-ICP1 ‎ made more recent cals on top of table for iCP1 Tag: Visual edit

12 April 2022

• 18:1618:16, 12 April 2022 diff hist +17‎ m Oxford ICP Etcher - Process Control Data ‎ added comment Tag: Visual edit

31 March 2022

• 15:4615:46, 31 March 2022 diff hist +225‎ m Oxford ICP Etcher - Process Control Data ‎ added entry to oxford 60c cals Tag: Visual edit
• 15:4515:45, 31 March 2022 diff hist 0‎ N File:Oxford 60c 04 CS 004.jpg ‎No edit summary current
• 15:4415:44, 31 March 2022 diff hist 0‎ N File:Oxford 60c 04 45D 001.jpg ‎No edit summary current

30 March 2022

• 17:2917:29, 30 March 2022 diff hist +238‎ m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher ‎ added entry in Fl Etcher, added selectivity to recent Cals Tag: Visual edit
• 17:2617:26, 30 March 2022 diff hist 0‎ N File:SiO2 Fl 05 CS 002.jpg ‎No edit summary current
• 17:2517:25, 30 March 2022 diff hist 0‎ N File:SiO2 Fl 03 45D 002.jpg ‎No edit summary current
• 17:1617:16, 30 March 2022 diff hist +223‎ m Test Data of etching SiO2 with CHF3/CF4 ‎ added entry to ICP2, added selectivity for recent cals Tag: Visual edit
• 17:1617:16, 30 March 2022 diff hist 0‎ N File:ICP2 03 45D 002.jpg ‎No edit summary current
• 17:1517:15, 30 March 2022 diff hist 0‎ N File:ICP2 03 CS 003.jpg ‎No edit summary current
• 17:0917:09, 30 March 2022 diff hist +12‎ m Test Data of etching SiO2 with CHF3/CF4-ICP1 ‎ added selectivity to recent ICP1 cals Tag: Visual edit
• 17:0317:03, 30 March 2022 diff hist +212‎ m Test Data of etching SiO2 with CHF3/CF4-ICP1 ‎ added entry in ICP1 Tag: Visual edit
• 17:0217:02, 30 March 2022 diff hist 0‎ N File:ICP1 03 CS 005.jpg ‎No edit summary current
• 17:0117:01, 30 March 2022 diff hist 0‎ N File:ICP1 03 45D 002.jpg ‎No edit summary current

9 March 2022

• 17:4217:42, 9 March 2022 diff hist +210‎ m Test Data of etching SiO2 with CHF3/CF4 ‎ added entry to ICP2 historical data Tag: Visual edit
• 17:4217:42, 9 March 2022 diff hist 0‎ N File:ICP2 02 CS 004.jpg ‎No edit summary current
• 17:4117:41, 9 March 2022 diff hist 0‎ N File:ICP2 02 45D 001.jpg ‎No edit summary current
• 17:3917:39, 9 March 2022 diff hist +212‎ m Test Data of etching SiO2 with CHF3/CF4-ICP1 ‎ added entry to ICP1 historical data Tag: Visual edit
• 17:3817:38, 9 March 2022 diff hist 0‎ N File:ICP1 02 CS 002.jpg ‎No edit summary current
• 17:3817:38, 9 March 2022 diff hist 0‎ N File:ICP1 02 45D 001.jpg ‎No edit summary current
• 17:3517:35, 9 March 2022 diff hist +455‎ m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher ‎ added entry to Fl historical data (wiht new table for 90s cals) Tag: Visual edit