User contributions for Pakala

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18:5018:50, 5 May 2022 diff hist 0‎ N File:ICP2 07 45D 002.jpg ‎No edit summary current

16:0916:09, 4 May 2022 diff hist +220‎ m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher ‎ added entry to FL cals Tag: Visual edit
16:0816:08, 4 May 2022 diff hist 0‎ N File:SiO2 Fl 08 CS 005.jpg ‎No edit summary current
16:0716:07, 4 May 2022 diff hist 0‎ N File:SiO2 Fl 08 45D 004.jpg ‎No edit summary current

21:1521:15, 28 April 2022 diff hist +220‎ m Unaxis VLR Etch - Process Control Data ‎ added new entry to unaxis cals Tag: Visual edit
21:1321:13, 28 April 2022 diff hist 0‎ N File:Unaxis 03 CS 003.jpg ‎No edit summary current
21:1221:12, 28 April 2022 diff hist 0‎ N File:Unaxis 03 45D 003.jpg ‎No edit summary current
21:0921:09, 28 April 2022 diff hist +202‎ m Oxford ICP Etcher - Process Control Data ‎ added entry to Oxford 60c cals Tag: Visual edit
21:0421:04, 28 April 2022 diff hist 0‎ N File:Oxford 60c 08 CS 009.jpg ‎No edit summary current
21:0421:04, 28 April 2022 diff hist 0‎ N File:Oxford 60c 08 45D 003.jpg ‎No edit summary current

18:0818:08, 27 April 2022 diff hist +3,202‎ m Unaxis VLR Etch - Process Control Data ‎ merged the two sets of ICP cal data Tag: Visual edit

20:3220:32, 26 April 2022 diff hist +299‎ m Oxford ICP Etcher - Process Control Data ‎ added new entry to oxford 60c cal Tag: Visual edit
20:3120:31, 26 April 2022 diff hist 0‎ N File:Oxford 60c 07 CS 001.jpg ‎No edit summary current
20:3020:30, 26 April 2022 diff hist 0‎ N File:Oxford 60c 07 45D 002.jpg ‎No edit summary current
20:2720:27, 26 April 2022 diff hist +215‎ m Test Data of etching SiO2 with CHF3/CF4 ‎ added new entry to ICP2 cals Tag: Visual edit
20:2620:26, 26 April 2022 diff hist 0‎ N File:ICP2 06 CS 001.jpg ‎No edit summary current
20:2620:26, 26 April 2022 diff hist 0‎ N File:ICP2 06 45D 002.jpg ‎No edit summary current
20:2420:24, 26 April 2022 diff hist +213‎ m Test Data of etching SiO2 with CHF3/CF4-ICP1 ‎ added entry to ICP1 cals Tag: Visual edit
20:2320:23, 26 April 2022 diff hist 0‎ N File:ICP1 06 CS 002.jpg ‎No edit summary current
20:2220:22, 26 April 2022 diff hist 0‎ N File:ICP1 06 45D 002.jpg ‎No edit summary current

18:2018:20, 21 April 2022 diff hist +13‎ m Unaxis VLR Etch - Process Control Data ‎ edited recipe on Unaxis Process control data Tag: Visual edit
18:1718:17, 21 April 2022 diff hist +3‎ m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher ‎ fixed typo Tag: Visual edit
18:0918:09, 21 April 2022 diff hist +219‎ m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher ‎ added entry to FL cals Tag: Visual edit
18:0818:08, 21 April 2022 diff hist 0‎ N File:SiO2 Fl 07 CS 004.jpg ‎No edit summary current
18:0718:07, 21 April 2022 diff hist 0‎ N File:SiO2 Fl 07 45D 003.jpg ‎No edit summary current
18:0218:02, 21 April 2022 diff hist +210‎ m Test Data of etching SiO2 with CHF3/CF4 ‎ added new entry to ICP2 cals Tag: Visual edit
18:0118:01, 21 April 2022 diff hist 0‎ N File:ICP2 05 CS 001.jpg ‎No edit summary current
18:0018:00, 21 April 2022 diff hist 0‎ N File:ICP2 05 45D 003.jpg ‎No edit summary current
17:5817:58, 21 April 2022 diff hist +211‎ m Test Data of etching SiO2 with CHF3/CF4-ICP1 ‎ added entry to ICP1 cals Tag: Visual edit
17:5717:57, 21 April 2022 diff hist 0‎ N File:ICP1 05 CS 002.jpg ‎No edit summary current
17:5617:56, 21 April 2022 diff hist 0‎ N File:ICP1 05 45D 001.jpg ‎No edit summary current

18:3618:36, 20 April 2022 diff hist −19‎ m Unaxis VLR Etch - Process Control Data ‎ started to enter etch recipe in to cal table Tag: Visual edit
18:3418:34, 20 April 2022 diff hist +382‎ m Unaxis VLR Etch - Process Control Data ‎ added new entries for Unaxis cals Tag: Visual edit
18:3318:33, 20 April 2022 diff hist 0‎ N File:Unaxis 02 CS 002.jpg ‎No edit summary current
18:3018:30, 20 April 2022 diff hist 0‎ N File:Unaxis 02 CS 004.jpg ‎No edit summary current
18:3018:30, 20 April 2022 diff hist 0‎ N File:Unaxis 02 45D 002.jpg ‎No edit summary current
18:2918:29, 20 April 2022 diff hist 0‎ N File:Unaxis 01 45D 002.jpg ‎No edit summary current
18:2918:29, 20 April 2022 diff hist 0‎ N File:Unaxis 01 CS 001.jpg ‎No edit summary current
18:1918:19, 20 April 2022 diff hist +325‎ m Oxford ICP Etcher - Process Control Data ‎ added entry in Oxford 60c cals Tag: Visual edit
18:1718:17, 20 April 2022 diff hist 0‎ N File:Oxford 60c 06 45D 002.jpg ‎No edit summary current
18:1618:16, 20 April 2022 diff hist 0‎ N File:Oxford 60c 06 CS 005.jpg ‎No edit summary current
18:1418:14, 20 April 2022 diff hist −8‎ m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher ‎ new SEM on SiO2_Fl_03 Tag: Visual edit
18:1218:12, 20 April 2022 diff hist 0‎ N File:SiO2 Fl 03 CS 004.jpg ‎No edit summary current

19:5819:58, 19 April 2022 diff hist +242‎ m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher ‎ added entry to Fl cals Tag: Visual edit
19:5619:56, 19 April 2022 diff hist 0‎ N File:SiO2 Fl 06 CS 002.jpg ‎No edit summary current
19:5619:56, 19 April 2022 diff hist 0‎ N File:SiO2 Fl 06 45D 002.jpg ‎No edit summary current
19:5219:52, 19 April 2022 diff hist +207‎ m Oxford ICP Etcher - Process Control Data ‎ added entry in Oxford, updated selectivity numbers Tag: Visual edit
19:4819:48, 19 April 2022 diff hist 0‎ N File:Oxford 60c 05 CS 002.jpg ‎No edit summary current
19:4819:48, 19 April 2022 diff hist 0‎ N File:Oxford 60c 05 45D 004.jpg ‎No edit summary current

17:3217:32, 14 April 2022 diff hist +216‎ m Test Data of etching SiO2 with CHF3/CF4 ‎ added entry to ICP2 cals Tag: Visual edit

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