User contributions for Noahdutra

Results for Noahdutra talk block log uploads logs

A user with 331 edits. Account created on 2 July 2022.

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20:4420:44, 8 October 2024 diff hist +42 N File:DSE 16um Bosch Etch - 22 013.jpg STD_Bosch_Si example 8/26/24
20:4220:42, 8 October 2024 diff hist +39 N File:30D 003.jpg STD_Bosch_Si etch picture current
20:3720:37, 8 October 2024 diff hist +38 N File:DSE plot.png Calibration plot for DSE current
20:3320:33, 8 October 2024 diff hist +1,340 ICP Etching Recipes →High Rate Bosch Etch (DSEIII): Preliminary changes to DSE site Tag: Visual edit
20:3220:32, 8 October 2024 diff hist +151 N File:Cal vs Legacy DSE.png Legacy DSE Si etch (Plasma-Therm Standard DSE) vs new Calibration Si etch (STD_Bosch_Si) looking at Etch rate dependence on Aspect Ratio. current

22:3122:31, 4 October 2024 diff hist 0 Dry Etching Recipes changed Oxford GaAs to R2 since we have no data, but there is a recipe on the tool. Tag: Visual edit

17:3217:32, 2 October 2024 diff hist +223 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Process Control Data: added picture to this page for Si etch Tag: Visual edit

16:3616:36, 30 September 2024 diff hist +157 ICP Etching Recipes Added a photo attributed to the SiVertHFv2 cal recipe Tag: Visual edit
16:2316:23, 30 September 2024 diff hist +34 N File:PRStrip 019 (1).jpg Si Etch FICP 9/19/24 current
16:1516:15, 30 September 2024 diff hist +23 N File:PRStrip 022 (1).jpg No edit summary current

11:4711:47, 16 September 2024 diff hist −111 Noah Dutra No edit summary Tag: Visual edit

21:0621:06, 13 September 2024 diff hist +83 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Process Control Data
21:0521:05, 13 September 2024 diff hist +140 ICP Etching Recipes →Si Etching (Fluorine ICP Etcher)
20:5920:59, 13 September 2024 diff hist −26 ICP Etching Recipes →Si Etching (Fluorine ICP Etcher) Tag: Visual edit
20:5820:58, 13 September 2024 diff hist +754 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Process Control Data Tag: Visual edit
20:5220:52, 13 September 2024 diff hist 0 Dry Etching Recipes No edit summary Tag: Visual edit
20:4220:42, 13 September 2024 diff hist −84 ICP Etching Recipes No edit summary Tag: Visual edit
20:4020:40, 13 September 2024 diff hist +896 ICP Etching Recipes →Si Etching (Fluorine ICP Etcher) Tag: Visual edit
20:3220:32, 13 September 2024 diff hist +48 N File:FICP-Si.png Fluorine ICP Si Etch Control Chart current

00:1100:11, 24 August 2024 diff hist +4,913 Vacuum Deposition Recipes added Thermal Evap rankings to wiki Tag: Visual edit

18:0618:06, 23 August 2024 diff hist +47 Dry Etching Recipes No edit summary Tag: Visual edit

18:5718:57, 15 August 2024 diff hist −8 Noah Dutra No edit summary Tag: Visual edit
18:5618:56, 15 August 2024 diff hist +2 Noah Dutra No edit summary Tag: Visual edit
18:5518:55, 15 August 2024 diff hist +8 Noah Dutra No edit summary Tag: Visual edit
01:0301:03, 15 August 2024 diff hist +1,321 Noah Dutra added descriptions Tag: Visual edit

19:3819:38, 13 August 2024 diff hist −378 Vacuum Deposition Recipes added sputters' rankings Tag: Visual edit

00:2100:21, 10 August 2024 diff hist 0 Dry Etching Recipes undoing last change Tag: Visual edit
00:1900:19, 10 August 2024 diff hist 0 Dry Etching Recipes Changed oxford AlGaAs etch recipe to R1 Tag: Visual edit

18:0418:04, 9 August 2024 diff hist +2 Dry Etching Recipes No edit summary Tag: Visual edit
17:4017:40, 9 August 2024 diff hist 0 Dry Etching Recipes changed Ru etch on ICP2 to R3 Tag: Visual edit
17:2317:23, 9 August 2024 diff hist 0 Dry Etching Recipes changed PR/BARC etch and SiN etch on FICP to R3 Tag: Visual edit
17:1517:15, 9 August 2024 diff hist 0 Dry Etching Recipes →Dry Etching Tools/Materials Table: Changed Si etch on FICP from R3 to R5 Tag: Visual edit

17:1617:16, 5 August 2024 diff hist +2,866 Vacuum Deposition Recipes added Ebeams rankings Tag: Visual edit
16:5516:55, 5 August 2024 diff hist −30 Vacuum Deposition Recipes No edit summary Tag: Visual edit
16:5416:54, 5 August 2024 diff hist −47 Vacuum Deposition Recipes No edit summary Tag: Visual edit
16:5316:53, 5 August 2024 diff hist +16 Vacuum Deposition Recipes No edit summary Tag: Visual edit
16:5216:52, 5 August 2024 diff hist +912 Vacuum Deposition Recipes added process ranking table Tag: Visual edit

22:0422:04, 30 July 2024 diff hist −1 Dry Etching Recipes changed "Process Control Data" link at the top so it didn't have an "f" at the front of it. Tag: Visual edit
17:3917:39, 30 July 2024 diff hist +85 Dry Etching Recipes corrected SiC for ICP2 so that it is R1 instead of R4, which was a mistake to ever put it at R4. Also added a link to GaAs etch on ICP2 Tag: Visual edit
17:3617:36, 30 July 2024 diff hist +83 Dry Etching Recipes added link to Al etch Tag: Visual edit
17:3517:35, 30 July 2024 diff hist −69 Dry Etching Recipes Did process rankings for ICP2, I also deleted a redundant row for Ru, there were two Ru rows Tag: Visual edit

16:1516:15, 29 July 2024 diff hist 0 m Dry Etching Recipes →Dry Etching Tools/Materials Table: Added "R6" to the key/legend description Tag: Visual edit

22:4722:47, 19 July 2024 diff hist −16 Dry Etching Recipes ficp etch ranking data pt5 Tag: Visual edit
22:4622:46, 19 July 2024 diff hist +16 Dry Etching Recipes ficp etch ranking data pt4 Tag: Visual edit
22:4522:45, 19 July 2024 diff hist −2 Dry Etching Recipes ficp etch ranking data pt3 Tag: Visual edit
22:4422:44, 19 July 2024 diff hist −170 Dry Etching Recipes ficp etch ranking data pt2 Tag: Visual edit
22:4322:43, 19 July 2024 diff hist +176 Dry Etching Recipes added rankings for FICP pt1 Tag: Visual edit
22:0822:08, 19 July 2024 diff hist +664 Dry Etching Recipes Added process ranking table Tag: Visual edit

16:5416:54, 12 January 2023 diff hist +230 Test Data of etching SiO2 with CHF3/CF4-ICP1 No edit summary current Tag: Visual edit
16:5216:52, 12 January 2023 diff hist 0 N File:Cs pan1 011123 002.jpg No edit summary current

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