Surface Analysis (KLA/Tencor Surfscan)

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Surface Analysis (KLA/Tencor Surfscan)

Tool Type	Inspection, Test and Characterization
Location	Bay 5

Description	?
Manufacturer	Tencor

About

This system uses a laser-based scattering method to count size and distribution of particles (or other scattering defects) on a flat wafer surface.

Documentation

Operations Manual

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