Frequently Asked Questions
General NanoFab Questions
Who do I contact for an equipment or general NanoFab problem?
For general Nanofab issues, please contact Tom Reynolds, cell phone: (805) 451-3979
Emergencies
For immediate or health-related emergencies, call 9-911 from any of the phones in the lab, or 911 from your cell phone. Let them know that you are in "Engineering Sciences Building #225" at "Room #1102 - Gowning Room".
Specific Equipment Problem
If you are having trouble with a piece of equipment, please contact the maintainer of that tool AND email the NanoFab Staff at NanoFab@ece.ucsb.edu. This emails all staff, so anyone available can help. Maintainer's contact information can be found posted on the walls above/behind the equipment, or on the tool page.
If you need immediate assistance during business hours, you may call their cell phone number, otherwise use their office phone or email.
Always notify maintainers immediately of any unusual problem that may affect other users, and also record it in the logbook!
Contact all NanoFab Staff by Email
The entire NanoFab staff can be emailed at NanoFab@ece.ucsb.edu. This allows any staff member who is able to help to respond in a timely manner. Any problem for which you are unsure who to contact, send it to this email address.
NanoFab On-Call Staff
For after-hours and weekend emergency situations, please call (805) 451-0509 to contact the staff member that is on-call. This is for major issues/emergencies that will affect many users, such as alarms, leaks, wet bench, fume hood issues etc. Please do not call this number for problems with a single process tool that only affects a few users, instead see above.
Can I add equipment reservations to my phone/computer/online calendar?
Yes, log into SignupMonkey, and on the "Future Reservations" column on the right, click on the "iCalendar" link. This links to a ".ics" file that lists all your upcoming equipment reservations. Open this file to add the reservations to your calendar.
Unfortunately deleted reservations will Not be removed from your calendar, because of the difficulty with CalDAV programming. I recommend having a whole separate calendar that you put reservations onto.
How do I get my files from the NanoFab computers?
USB ports are disabled on most NanoFab computers to prevent the spread of viruses.
Instead, you can download your files from our SFTP server. As long as you place your files into the proper directory on the computer, your files will be synced to the NanoFiles STFP server every hour (or immediately by running the "Sync to NanoFiles" script).
For further information on how to access these files, and where to place your files, please log into SignupMonkey and click the Files > Request Login Credentials link. The email you receive will give you instructions on accessing/syncing to the NanoFiles server.
Processing/Fabrication Questions
Where do I find a recipe for a process (litho/etch/dep etc.)?
The "Recipes and Data" section on the left sidebar lists the different categories of recipes. In those pages, you can see whether a recipe exists for your process, and on which tool. We often include some basic characterization data on the recipes, but you should note that these are approximate only. If you have tight tolerances, you need to characterize the recipe yourself (ie. figure out deposition/etch rate, selectivity, verticality etc.).
For some recipes (etches in particular), we often post the parameter variations/recipe characterizations to show you how different recipe variables affect the etch. If you find that a provided recipe isn't exactly what you need, you can use this information to modify a copy of the recipe to suit your own needs. Please refer to the tool owner for creating your own recipes on each tool, especially for those that have a limited number of saved recipe slots.
Many datasheets provide very usedul process info. For example, the datasheets for lithography photoresists/developers and solvents usually show spin curves (thickness vs. spin speed), exposure dose, bake times, resist profile vs. reflow temp etc.
You can find photolithography datasheets on the Chemical Datasheets section of the Lithography Recipes page.
A recipe is indicated as "A", Available, where do I find info on this recipe?
If a recipe is marked as "A", Available on one of the recipe tables, this usually means that a graduate student has done this process at some point, but the NanoFab hasn't necessarily verified the process nor has the exact recipe and characterization. Contact anyone in the Process Group to get in contact with the research group that developed the recipe.
I need help using a tool, where do I get help?
There are so many little details to remember in the cleanroom, we all sometimes forget something or need a reminder. When in doubt, ask for help!
- First, check to see if printed instructions are found at the tool itself.
- Second, check the Wiki page for that tool - many of our instruction sets and user manuals are posted on the Tool page in the Equipment section (see the left side bar).
- Third, during business hours (eg. 7am-5pm) you can contact the tool maintainer. Contact info is posted on the glass walls above each tool.
- Fourth (maybe first) option, look for an experienced user in the lab who might be able to help. Our users are typically very collaborative, knowledgeable and helpful!
Wiki Questions
How do I get a login to the wiki?
If you have an active SignupMonkey login, then you can create a Wiki login yourself.
Just click the "Create an Account" link in the corner of the page,
Fill in your info, making sure you use the same email address you use for SignupMonkey)
Then click the link in the confirmation email you receive.
You will then be able to log in and edit many of the wiki pages.
How do I edit a page?
First, you need to have a login. Then you simply click [Edit] on a page you wish to change. The [Edit] option will only be available for pages that you are authorized to change, which does not include all pages.
[Edit] brings up the Visual Editor, which allows you to type directly into a page without editing any code, like using a regular word processing program. [Edit Source] will show you the wiki markup code for the page, which is also an acceptable way to edit a page but much less intuitive.
Please see the Editing Tutorials for more information on editing a page.
What do I do if I find an error on the wiki?
If you locate a mistake, error or typo, log in and make the change yourself. Staff will see your edits and approve them.
If you don't have edit permission, let Demis know about the change you wish to make.
Why aren't my edits showing up?
While lab users are allowed to edit the wiki, all those edits will be approved by a staff member before going live.