UV Ozone Reactor

From UCSB Nanofab Wiki
Revision as of 22:57, 17 July 2018 by John d (talk | contribs) (add description and model)
Jump to navigation Jump to search
UV Ozone Reactor
Ozone.jpg
Tool Type Dry Etch
Location Bay 5
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail bosch@ece.ucsb.edu
Description UV Ozone Reactor
Manufacturer Jelight
Model M-144AX
Dry Etch Recipes


About

The UV Ozone is manufactured by Jelight, model M-144AX. It can be used for Oxygen activation, etching or oxidation of a surface without ion bombardment.

Operating Procedures

Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=UV_Ozone_Reactor&oldid=155296"