Automated Coat/Develop System (S-Cubed Flexi)

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Revision as of 22:31, 8 October 2019 by John d (talk | contribs) (Added ToolTemplate - tool type and recepe)
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Automated Coat/Develop System (S-Cubed Flexi)
Tool Type Lithography
Location Bay 7
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail bosch@ece.ucsb.edu
Description Automatic Coat/Bake/Develop
Manufacturer S-Cubed
Lithography Recipes


About

To Be Added

Detailed Specifications

  • Wafer Size:
  • Photoresists/Underlayers Available:
  • Solvents Available:
  • Developers Available:

Process Information

  • TBD

Operating Procedures

  • TBD
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