Template:Announcements
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Equipment Status
ASML is DOWN: Repair Expected Monday
Level sensor failed. May require hardware replacement for lamp housing, will likely get an ASML technician on site on Monday Jan 6th. // John d 12:33, 2 January 2020 (PST)
Unaxis ICP-PECVD
The ICP-PECVD module is down for general use. We are conducting experiments with the Deuterated Silane and are not allowing general use of the tool. Silva 15:04, 19 November 2019 (PST)
Suss Bonder
Suss Bonder is DOWN. The vendor is struggling to get the software and hardware upgrades to work. We have a meeting next week, 10/28/19, to discuss options. Silva 11:16, 25 October 2019 (PDT)