Spin Rinse Dryer (SemiTool)

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Spin Rinse Dryer (SemiTool)
SpinRinse.jpg
Location Bay 5
Tool Type Wet Processing
Manufacturer SemiTool
Description ?
Primary Supervisor Michael Barreraz
(805) 893-4147
mikebarreraz@ece.ucsb.edu

Secondary Supervisor

Don Freeborn

Recipes


Two Spin-Rinse Dryers are available, one for 4-inch wafers and one for 6-inch wafers.

Each has a dedicated cassette that can hold up to 25 wafers.

The tool is set up to rinse at ~1000 rpm while spraying DI water, and then Dry in nitrogen at ~2000 rpm. A "Dry Only" option is also available.

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