Spin Rinse Dryer (SemiTool)

Spin Rinse Dryer (SemiTool) Location Bay 5 Tool Type Wet Processing Manufacturer SemiTool Description ? Primary Supervisor Michael Barreraz (805) 893-4147 mikebarreraz@ece.ucsb.edu Secondary Supervisor Don Freeborn Recipes

Two Spin-Rinse Dryers are available, one for 4-inch wafers and one for 6-inch wafers.

Each has a dedicated cassette that can hold up to 25 wafers.

The tool is set up to rinse at ~1000 rpm while spraying DI water, and then Dry in nitrogen at ~2000 rpm. A "Dry Only" option is also available.