Template:Announcements

Stepper #3 (ASML DUV) - Maintenance April 10th week

ASML engineers will be performing periodic maintenance the week of April 10th. Please plan for the system to be down ~10a Monday April 10th, until Friday that week. //Vraj Mehalana 09:17, 4 April 2023 (PDT)

FEI SEM#1 Replacement Project

The FEI SEM #1 will be removed and replaced starting Friday March 17th. Both SEMs will be shut down and the SEM room will be off limits beginning at 8 am Friday and return to normal operations Tuesday morning the 21st. //Vraj Mehalana 10:55, 16 March 2023 (PDT)

Unaxis Etch: Down

We had to take the VAT controller off of this module to get the ICP-PECVD running. I have no immediate ETA for this system coming back online. Until we get this system running again you will need to use the Oxford Cobra system. -- Tony // John d 09:35, 13 February 2023 (PST)

Au Plating: UP

only the full 100mm wafer fixture is available at the moment. You can plate smaller pieces on it with no issues. // Vraj Mehalana 12:35, 15 March 2023 (PDT)