Template:Announcements

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E-Beam #4 (CHA) - EB4 is down

We need to replace a part on the source shutter. We should have it on Monday. I'll update when the tool is available. //Vraj Mehalana 15:26, 28 April 2023 (PDT)

Wafer Coater (S Cubed Flexi) - S3 field service

S3 will be on-site looking into our hand 2 issues on Wednesday May 3rd and 4th. They will be confirming Monday so there is a chance those days get shifted. Please plan your processing accordingly as the system will not be available while they are here looking into the problem. //Vraj Mehalana 13:54, 28 April 2023 (PDT)

FEI SEM#1 Replacement Project

The FEI SEM #1 will be removed and replaced starting Friday March 17th. Both SEMs will be shut down and the SEM room will be off limits beginning at 8 am Friday and return to normal operations Tuesday morning the 21st. //Vraj Mehalana 10:55, 16 March 2023 (PDT)

Unaxis Etch: Down

We had to take the VAT controller off of this module to get the ICP-PECVD running. I have no immediate ETA for this system coming back online. Until we get this system running again you will need to use the Oxford Cobra system. -- Tony // John d 09:35, 13 February 2023 (PST)

Au Plating: UP

only the full 100mm wafer fixture is available at the moment. You can plate smaller pieces on it with no issues. // Vraj Mehalana 12:35, 15 March 2023 (PDT)