File:PECVD1 SiN Stress vs. N2 plot.jpg

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Example of Si3N4 modified stress via. varying N2 flow. Refractive index is relatively constant (one outlier), and stress varies continuously from tensile to compressive. Demis D. John 2011, Blumenthal Group.

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current19:08, 2 June 2023Thumbnail for version as of 19:08, 2 June 2023843 × 576 (85 KB)John d (talk | contribs)better formatting, colors axes mathcing markers etc
18:52, 2 June 2023Thumbnail for version as of 18:52, 2 June 2023842 × 572 (73 KB)John d (talk | contribs)

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