Template:Announcements
PECVD2 Planned Down Time for Maintenance 10-19-23
PECVD2 will be going down on Thursday October 19th for replacement of the hoist. This will be an all day event starting at 8:00am. Please plan accordingly. This was originally planned for 10-2, but we had to reschedule due to other equipment down //Vraj Mehalana 15:18, 12 October 2023 (PDT)
Raith Velion - Velion repair - status update
The new stage motor is now onsite and a Raith field service engineer will install it on Wednesday. I expect the tool will be returned to users on Friday, I'll update again if anything changes. //Vraj Mehalana 12:17, 11 October 2023 (PDT)
Unaxis ICP-PECVD is UP for Non-GapFill
Tool is up for NON-GapFill (450W RF Bias) Recipes. Other Std SiO2/SiN deps are available. Next Week Monday Oct 16th to Wed 18th we will allow GapFill (450W RF Bias) recipes to be run. Please plan your process accordingly. Also we are still testing our own GapFill recipe that hopefully reduces flakes. Once this is ready you’ll want to qualify our new recipe to make sure it works for your application, as the old GapFill recipe will eventually be deprecated & disallowed. //Vraj Mehalana 09:55, 11 October 2023 (PDT)
Wafer Bonder, (Suss SB6-8E)
The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update. //Vraj Mehalana 09:59, 20 September 2023 (PDT)
Dicing Saw Upgrade - Update
The upgrade work on the saw is completed. My plan is to work on updating the SOP and running some more tests tomorrow and Monday. If all goes smoothly I should be ready to start re-training users on Tuesday, so I should be sending out an email some time Monday in regard to the re-training schedule. -Lee //Vraj Mehalana 13:25, 3 October 2023 (PDT)
Stepper #1 (GCA 6300) Scheduled Maintenance
The scheduled maintenance activates on 9-28-23 have been cancelled and will be rescheduled at a later date. The tool is now available to be reserved for use on that date. //Vraj Mehalana 10:29, 26 September 2023 (PDT)
Stepper #2 (GCA Autostep 200) - Scheduled Maintenance
The Autostep 200 will be undergoing maintenance and will be unavailable on the following dates and times: (1) 09-30-23 8:00am-5:00pm (2) 10-01-23 8:00am-5:00pm (3) 10-02-23 8:00am-12:00pm Please plan your work activities accordingly. //Vraj Mehalana 13:49, 27 September 2023 (PDT)
EVG is down
We have received the part to repair the tool but we are still consulting with EVG as to who will be preforming the repair work. We hope to have a better handle on this early next week and will update everyone at that time. -Lee //Vraj Mehalana 10:51, 29 September 2023 (PDT)