ICP Etching Recipes

From UCSB Nanofab Wiki

Revision as of 22:34, 10 July 2013 by Thibeault (talk | contribs)

(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)

Jump to navigation Jump to search

Back to Dry Etching Recipes.

ICP Etch 1 (Panasonic E626I)

SiO₂ Vertical Etch (Panasonic 1)

SiO₂ Vertical Etch Recipe

Cr Etch (Panasonic 1)

Cr Etch Recipes

ICP Etch 2 (Panasonic E640)

SiOx Vertical Etch (Panasonic 2)

SiOx Vertical Etch Recipe

ICP-Etch (Unaxis VLR)

InP Etch (Unaxis VLR)

InP Etch

InP Etch Recipe (200C)

InP Etch (H₂ Ar)

InP Etch Recipe (H₂ Ar 200C)

Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=ICP_Etching_Recipes&oldid=2811"

Recipes