Template:LithRecipe Table v2
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| width="100" bgcolor="#DAF1FF" | SUSS MJB-3
| width="100" bgcolor="#DAF1FF" | SUSS MA-6
| width="100" bgcolor="#DAF1FF" | Stepper 1
(GCA 6300)
| width="100" bgcolor="#DAF1FF" | Stepper 2
(AutoStep 200)
| width="100" bgcolor="#DAF1FF" | Stepper 3
(ASML DUV)
| width="100" bgcolor="#DAF1FF" | DUV Flood
| width="175" bgcolor="#DAF1FF" | Field Emission SEM 1
(FEI Sirion)
| width="175" bgcolor="#DAF1FF" | E-Beam Lithography System
(JEOL JBX-6300FS)