Difference between revisions of "ASML 5500: Recovering from a Typo in Reticle ID"
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Edit your job and type in the correct reticle ID. You can look at the "Mat Hdl" (Material handler) > Exchange Reticles and copy/paste the Recticle ID from there. |
Edit your job and type in the correct reticle ID. You can look at the "Mat Hdl" (Material handler) > Exchange Reticles and copy/paste the Recticle ID from there. |
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− | [[User:John d|John d]] 23:58, 20 March 2018 (PDT) |
Latest revision as of 23:59, 20 March 2018
If you ran a job and got "Reticle Not Present" due to a typo in your job/layer/image's reticle ID.
- Do NOT exit task streaming!
- Abort the Batch: Choose the task, click "Abort"
- In the following popup window, click "Remove Wafer from Litho Cluster"
- Wait for the task status to change from "Aborting" to "Aborted"
Your wafer should be removed to Port #2, and the task should be "Aborted" on the task list.
Edit your job and type in the correct reticle ID. You can look at the "Mat Hdl" (Material handler) > Exchange Reticles and copy/paste the Recticle ID from there.