Difference between revisions of "ASML Stepper 3 Error Recovery, Troubleshooting and Calibration"
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(moved some procedures onto this one common page) |
(added some common warnings) |
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− | === |
+ | === Common Warnings === |
+ | The following messages in the '''Warnings''' window are normal and do not require any action |
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+ | |||
+ | * ''Machine is Idle: Light Source Switched Off'' |
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+ | * ''Empty Input Carrier'' |
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+ | |||
+ | ===afer Recovery=== |
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See the [https://www.nanotech.ucsb.edu/wiki/index.php/ASML_5500:_Recovering_from_an_Error Wafer Recovery page] for procedure on how to recover from an error and get your wafers back. |
See the [https://www.nanotech.ucsb.edu/wiki/index.php/ASML_5500:_Recovering_from_an_Error Wafer Recovery page] for procedure on how to recover from an error and get your wafers back. |
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− | === |
+ | ===Error Log full=== |
− | # Close logging window |
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− | # Open new console window: Rt click on Desktop, select '''(ASML)''' |
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− | # At '''%''' prompt, type '''''logging''''' (all lowercase!) |
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− | # Resize window and place in upper right area of screen as normal. |
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+ | #Close logging window |
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− | === Wafer Handler Issues during Batch operation === |
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+ | #Open new console window: Rt click on Desktop, select '''(ASML)''' |
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− | # Make sure no Batches are Running or Waiting! '''Abort''' the Batch or '''Stop''' the Queue. |
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+ | #At '''%''' prompt, type '''''logging''''' (all lowercase!) |
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− | ## Never exit the Task Streaming screen while Batches are incomplete/running, you will enter software limbo on infinite loop drive, requiring a software restart. |
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+ | #Resize window and place in upper right area of screen as normal. |
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− | # Lift black cover behind keyboard |
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− | # Press '''AWH''' button for 1 sec and release (resets Wafer Handler) |
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− | # Wait until wafer handler ''“system booting”'' message is done and warning window in bottom left of main computer console has disappeared. Log window should say it booted succesfully. Takes a few minutes. |
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− | # ('''''DO NOT''''' ''do FAST STARTUP from error message, go to main menu!)'' |
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− | # Exit to '''main menu''' |
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− | # Go to '''Start/Stop''' |
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− | # '''Fast Startup''' |
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− | # '''Start''' - will reinitialize the wafer handler system |
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− | # Once complete, back to '''main menu''' |
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− | # If wafers in machine, go to material handler '''(Mat Hdl)'''. |
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− | ## Go to '''Remove Wafers''' menu and '''Collect Wafers''' |
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− | ## Back to '''main menu''' when finished. |
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− | # If system says wafer is missing, contact engineer |
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+ | ===Wafer Handler Issues during Batch operation=== |
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− | === IQC (Image Quality Control) Calibration Check === |
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− | # '''Main Menu > Test Manager > Run Tests > Metrology Verification > Image Quality Control''' |
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− | # '''Accept''' (Upper Button) |
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− | # '''Perform Measurement''' |
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− | # Choose '''System Correction''' |
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− | ## # Cycles = 1 |
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− | ## # Measurements = 3 |
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− | ## # Corrections = 1 |
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− | ## '''M''' "Measure" mode only (does Not update internal lookup tables) |
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− | ## (UCSB numbers for test 1 3 1 M) |
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− | # Accept to run the test |
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− | ## If '''| focus correction |''' < 50nm, system OK, note number in log book |
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− | ## If '''| focus correction |''' > 50nm, run test again, if number keeps dropping, keep running until number stable |
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− | ## If '''| focus correction |''' is still > 50nm, discuss with engineer |
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+ | #Make sure no Batches are Running or Waiting! '''Abort''' the Batch or '''Stop''' the Queue. |
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− | === Laser Refill (or laser calling for gas injection) === |
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+ | ##Never exit the Task Streaming screen while Batches are incomplete/running, you will enter software limbo on infinite loop drive, requiring a software restart. |
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− | # '''Main Menu > Test Manager''' |
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+ | #Lift black cover behind keyboard |
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− | # Open Cmd Handler '''(Cmd Hdl)''' (Top Menu) |
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+ | #Press '''AWH''' button for 1 sec and release (resets Wafer Handler) |
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− | ## '''Illumination and Projection > Illumination''' |
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+ | #Wait until wafer handler ''“system booting”'' message is done and warning window in bottom left of main computer console has disappeared. Log window should say it booted succesfully. Takes a few minutes. |
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− | ### Use '''Laser Start''' if laser asking for gas injection, otherwise do '''New Laser Fill''' |
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+ | #('''''DO NOT''''' ''do FAST STARTUP from error message, go to main menu!)'' |
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+ | #Exit to '''main menu''' |
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+ | #Go to '''Start/Stop''' |
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+ | #'''Fast Startup''' |
||
+ | #'''Start''' - will reinitialize the wafer handler system |
||
+ | #Once complete, back to '''main menu''' |
||
+ | #If wafers in machine, go to material handler '''(Mat Hdl)'''. |
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+ | ##Go to '''Remove Wafers''' menu and '''Collect Wafers''' |
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+ | ##Back to '''main menu''' when finished. |
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+ | #If system says wafer is missing, contact engineer |
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+ | ===IQC (Image Quality Control) Calibration Check=== |
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− | === Failed Alignment Marks - Choosing new alignment marks for Pre-Alignment === |
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+ | |||
+ | #'''Main Menu > Test Manager > Run Tests > Metrology Verification > Image Quality Control''' |
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+ | #'''Accept''' (Upper Button) |
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+ | #'''Perform Measurement''' |
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+ | #Choose '''System Correction''' |
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+ | ##<nowiki># Cycles = 1</nowiki> |
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+ | ##<nowiki># Measurements = 3</nowiki> |
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+ | ##<nowiki># Corrections = 1</nowiki> |
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+ | ##'''M''' "Measure" mode only (does Not update internal lookup tables) |
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+ | ##(UCSB numbers for test 1 3 1 M) |
||
+ | #Accept to run the test |
||
+ | ##If '''| focus correction |''' < 50nm, system OK, note number in log book |
||
+ | ##If '''| focus correction |''' > 50nm, run test again, if number keeps dropping, keep running until number stable |
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+ | ##If '''| focus correction |''' is still > 50nm, discuss with engineer |
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+ | |||
+ | ===Laser Refill (or laser calling for gas injection)=== |
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+ | |||
+ | #'''Main Menu > Test Manager''' |
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+ | #Open Cmd Handler '''(Cmd Hdl)''' (Top Menu) |
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+ | ##'''Illumination and Projection > Illumination''' |
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+ | ###Use '''Laser Start''' if laser asking for gas injection, otherwise do '''New Laser Fill''' |
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+ | |||
+ | ===Failed Alignment Marks - Choosing new alignment marks for Pre-Alignment=== |
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''If your job aborted with "Alignment failure" on the E- or P-Chuck, because your alignment marks are damaged, this is how to edit your job to use different alignment marks.'' |
''If your job aborted with "Alignment failure" on the E- or P-Chuck, because your alignment marks are damaged, this is how to edit your job to use different alignment marks.'' |
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+ | |||
− | # Edit your job with Modify Job |
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+ | #Edit your job with Modify Job |
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− | # Go to '''''Layer Layout > Process Data''''' |
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+ | #Go to '''''Layer Layout > Process Data''''' |
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− | # Use Layer: '''''(Prev)''''' / '''''(Next)''''' to select the layer you need to change alignment marks for |
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− | # |
+ | #Use Layer: '''''(Prev)''''' / '''''(Next)''''' to select the layer you need to change alignment marks for |
+ | #Under '''''Prealignment Mode''''': '''''Selection: Mark 1___ & Mark 2___''''' choose the alignment marks to align to, and use a microscope to make sure these alignment marks are (a) present on your wafer and (b) look ok with no defects. |
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− | ## The wafer schematic shows which alignment marks you are choosing. |
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+ | ##The wafer schematic shows which alignment marks you are choosing. |
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− | ## The alignment marks, defined on a previous layer (usually combined with the first litho), are programmed/named in: ''<to be added: where in the program the AlMks are defined>'' |
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+ | ##The alignment marks, defined on a previous layer (usually combined with the first litho), are programmed/named in: ''<to be added: where in the program the AlMks are defined>'' |
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− | # Your "Fine" alignment marks will probably also fail if they're set to use the same marks! Fix this by editing your '''Wafer Layout > Alignment Strategy''', and select different alignment marks or set some "backup" marks. Make sure your '''Layer Layout > Strategy Selection''' is using this new/updated strategy. |
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+ | #Your "Fine" alignment marks will probably also fail if they're set to use the same marks! Fix this by editing your '''Wafer Layout > Alignment Strategy''', and select different alignment marks or set some "backup" marks. Make sure your '''Layer Layout > Strategy Selection''' is using this new/updated strategy. |
Revision as of 10:25, 19 December 2019
Common Warnings
The following messages in the Warnings window are normal and do not require any action
- Machine is Idle: Light Source Switched Off
- Empty Input Carrier
afer Recovery
See the Wafer Recovery page for procedure on how to recover from an error and get your wafers back.
Error Log full
- Close logging window
- Open new console window: Rt click on Desktop, select (ASML)
- At % prompt, type logging (all lowercase!)
- Resize window and place in upper right area of screen as normal.
Wafer Handler Issues during Batch operation
- Make sure no Batches are Running or Waiting! Abort the Batch or Stop the Queue.
- Never exit the Task Streaming screen while Batches are incomplete/running, you will enter software limbo on infinite loop drive, requiring a software restart.
- Lift black cover behind keyboard
- Press AWH button for 1 sec and release (resets Wafer Handler)
- Wait until wafer handler “system booting” message is done and warning window in bottom left of main computer console has disappeared. Log window should say it booted succesfully. Takes a few minutes.
- (DO NOT do FAST STARTUP from error message, go to main menu!)
- Exit to main menu
- Go to Start/Stop
- Fast Startup
- Start - will reinitialize the wafer handler system
- Once complete, back to main menu
- If wafers in machine, go to material handler (Mat Hdl).
- Go to Remove Wafers menu and Collect Wafers
- Back to main menu when finished.
- If system says wafer is missing, contact engineer
IQC (Image Quality Control) Calibration Check
- Main Menu > Test Manager > Run Tests > Metrology Verification > Image Quality Control
- Accept (Upper Button)
- Perform Measurement
- Choose System Correction
- # Cycles = 1
- # Measurements = 3
- # Corrections = 1
- M "Measure" mode only (does Not update internal lookup tables)
- (UCSB numbers for test 1 3 1 M)
- Accept to run the test
- If | focus correction | < 50nm, system OK, note number in log book
- If | focus correction | > 50nm, run test again, if number keeps dropping, keep running until number stable
- If | focus correction | is still > 50nm, discuss with engineer
Laser Refill (or laser calling for gas injection)
- Main Menu > Test Manager
- Open Cmd Handler (Cmd Hdl) (Top Menu)
- Illumination and Projection > Illumination
- Use Laser Start if laser asking for gas injection, otherwise do New Laser Fill
- Illumination and Projection > Illumination
Failed Alignment Marks - Choosing new alignment marks for Pre-Alignment
If your job aborted with "Alignment failure" on the E- or P-Chuck, because your alignment marks are damaged, this is how to edit your job to use different alignment marks.
- Edit your job with Modify Job
- Go to Layer Layout > Process Data
- Use Layer: (Prev) / (Next) to select the layer you need to change alignment marks for
- Under Prealignment Mode: Selection: Mark 1___ & Mark 2___ choose the alignment marks to align to, and use a microscope to make sure these alignment marks are (a) present on your wafer and (b) look ok with no defects.
- The wafer schematic shows which alignment marks you are choosing.
- The alignment marks, defined on a previous layer (usually combined with the first litho), are programmed/named in: <to be added: where in the program the AlMks are defined>
- Your "Fine" alignment marks will probably also fail if they're set to use the same marks! Fix this by editing your Wafer Layout > Alignment Strategy, and select different alignment marks or set some "backup" marks. Make sure your Layer Layout > Strategy Selection is using this new/updated strategy.