Difference between revisions of "File:PECVD1 SiN Stress vs. N2 plot.jpg"
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Revision as of 11:52, 2 June 2023
Example of Si3N4 modified stress via. varying N2 flow. Refractive index is relatively constant (one outlier), and stress varies continuously from tensile to compressive. Demis D. John 2011, Blumenthal Group.
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current | 12:08, 2 June 2023 | 843 × 576 (85 KB) | John d (talk | contribs) | better formatting, colors axes mathcing markers etc | |
11:52, 2 June 2023 | 842 × 572 (73 KB) | John d (talk | contribs) |
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