Difference between revisions of "ICP Etching Recipes"
Jump to navigation
Jump to search
Line 4: | Line 4: | ||
*[[media:Panasonic1-SiO-Etch.pdf|SiO<sub>2</sub> Vertical Etch Recipe]] |
*[[media:Panasonic1-SiO-Etch.pdf|SiO<sub>2</sub> Vertical Etch Recipe]] |
||
==Cr Etch (Panasonic 1)== |
==Cr Etch (Panasonic 1)== |
||
− | *[[media:Panasonic-1-Cr-Etch|Cr Etch Recipes]] |
+ | *[[media:Panasonic-1-Cr-Etch.pdf|Cr Etch Recipes]] |
=[[ICP Etch 2 (Panasonic E640)]]= |
=[[ICP Etch 2 (Panasonic E640)]]= |
Revision as of 15:34, 10 July 2013
Back to Dry Etching Recipes.