Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX)

From UCSB Nanofab Wiki
Revision as of 09:04, 13 September 2022 by John d (talk | contribs) (→‎Equipment Specifications: addded spot size and glass slides for small samples)
(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)
Jump to navigation Jump to search
Optical Transmission/Reflection Spectra
Filmetrics-F10-RT Photo.jpeg
Location Bay 4
Tool Type Inspection, Test and Characterization
Manufacturer Filmetrics
Model Filmetrics F10-RT-UVX
Description Thin-Film Spectrometry

Primary Supervisor Aidan Hopkins
(805) 893-2343
hopkins@ece.ucsb.edu

Secondary Supervisor

Demis D. John


Recipes N/A


About

This tool simultaneously measures the optical transmission and reflection spectrum through a thin-film. Subsequent software analysis allows the user to calculate absorbance, color index properties, film thickness and/or refractive index. A Halogen lamp (Vis/nIR) and Deuterium lamp (UV) are available as light sources. The system has two spectrometers, spanning the UV (190nm) to near infrared (1700nm).

The data can optionally be modeled and the optical parameters (thickness, refractive index, absorption coefficient) are adjusted to give a best least-squared fit to the data. The accuracy of the technique will depend on the thickness of the film and the optical models used for the fitting of the data. For a more complete description go to Filmetrics.

For high-accuracy refractive index data, we recommend using the J.A. Woolam Ellipsometer, while The F10-RT will provide higher accuracy for thicker films and multi-layer coatings that the JAW has trouble modeling.

Equipment Specifications

  • 190–1700 nm reflection & transmission spectrum (simultaneous)
  • 10 Å to 150 µm film thickness, n, and k measurements
  • Manual sample placement.
  • Sample size 10 mm to 150 mm
    • Smaller samples can be accommodated on glass slides if needed.
  • 1-2mm measurement spot size.
  • Data can be saved/retrieve for offline analysis
  • Can model multiple layers, including periodic multi-layer stacks
  • Can enter custom optical models or tabulated n/k data

Operation Procedures