Difference between revisions of "Oven 4 (Thermo-Fisher HeraTherm)"

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Line 2: Line 2:
|type = Lithography
|type = Lithography
|super= Tony Bosch
|super= Brian Lingg
|location=Bay 6
|location=Bay 6
|description = Programmable Oven
|description = Programmable Oven

Revision as of 10:18, 15 April 2020

Oven 4 (Thermo-Fisher HeraTherm)
Tool Type Lithography
Location Bay 6
Supervisor Brian Lingg
Supervisor Phone (805) 893-8145
Supervisor E-Mail lingg_b@ucsb.edu
Description Programmable Oven
Manufacturer Thermo Scientific
Model HeraTherm


This oven is often used for long thermal cures and wafer bonding. It has programmable temperature ramps and hold times, but the ramp rate is only "low/med./high" (not an exact ramp rate). A manual needle valve for nitrogen purge has been installed on the back of the oven.


  • Maximum Temperature = 330 C (no active cooling)
  • Gases: N2, manually set with needle valve (not programmable)
  • Multi-step programmable temperature ramps
  • Programmable atmospheric purge (for cooling)


To Do: User Manual