Difference between revisions of "Oven 4 (Thermo-Fisher HeraTherm)"
Jump to navigation
Jump to search
(added toolid for SUM) |
|||
Line 2: | Line 2: | ||
|picture=Oven4.jpg |
|picture=Oven4.jpg |
||
|type = Lithography |
|type = Lithography |
||
− | |super= |
+ | |super= Michael Barreraz |
+ | |super2= Aidan Hopkins |
||
|location=Bay 6 |
|location=Bay 6 |
||
|description = Programmable Oven |
|description = Programmable Oven |
Revision as of 10:19, 30 August 2022
|
About
This oven is often used for long thermal cures and wafer bonding. It has programmable temperature ramps and hold times, but the ramp rate is only "low/med./high" (not an exact ramp rate). A manual needle valve for nitrogen purge has been installed on the back of the oven.
Specifications
- Maximum Temperature = 330 C (no active cooling)
- Gases: N2, manually set with needle valve (not programmable)
- Multi-step programmable temperature ramps
- Programmable atmospheric purge (for cooling)
Documentation
To Do: User Manual |