Oven 4 (Thermo-Fisher HeraTherm)

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Oven 4 (Thermo-Fisher HeraTherm)
Tool Type Lithography
Location Bay 6
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail bosch@ece.ucsb.edu
Description Programmable Oven
Manufacturer Thermo Scientific
Model HeraTherm


This oven is often used for long thermal cures and wafer bonding. It has programmable temperature ramps and hold times, but the ramp rate is only "low/med./high" (not an exact ramp rate). A manual needle valve for nitrogen purge has been installed on the back of the oven.


  • Maximum Temperature =
To Do: find max. temp.

(no active cooling)

  • Gases: N2, manually set with needle valve (not programmable)
  • Multi-step programmable temperature ramps
  • Programmable atmospheric purge (for cooling)


To Do: User Manual