Difference between revisions of "PECVD 2 (Advanced Vacuum)"
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|picture=PECVD2.jpg | |picture=PECVD2.jpg | ||
|type = Vacuum Deposition | |type = Vacuum Deposition | ||
| − | |super= | + | |super= Don Freeborn |
| − | |phone=(805)839- | + | |phone=(805)839-7975 |
|location=Bay 2 | |location=Bay 2 | ||
|email=silva@ece.ucsb.edu | |email=silva@ece.ucsb.edu | ||
|description = Vision 310 Advanced Vacuum PECVD | |description = Vision 310 Advanced Vacuum PECVD | ||
| − | |manufacturer = | + | |manufacturer = Plasma-Therm |
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==About== | ==About== | ||
| − | This open-load system is dedicated to PECVD of SiO<sub>2</sub>, SiN<sub>x</sub>, SiO<sub>x</sub>N<sub>y</sub>, and a-Si using Silane (2%SiH<sub>4</sub>, 98% He), N<sub>2</sub>O, NH<sub>3</sub>, and N<sub>2</sub> gases. The sample electrode has a 270mm diameter useable area, allowing for multiple 4” wafer depositions in a single run. Standard operating temperature is 300C, but can be user changed for temps ranging anywhere from 250 to 350C. The system is equipped with a dual generator, dual frequency option for growth of | + | *'''Films/Gases''': This open-load system is dedicated to PECVD of '''SiO<sub>2</sub>, SiN<sub>x</sub>, SiO<sub>x</sub>N<sub>y</sub>, and a-Si''' using Silane (2%SiH<sub>4</sub>, 98% He), N<sub>2</sub>O, NH<sub>3</sub>, and N<sub>2</sub> gases. |
| + | *'''Size''': The sample electrode has a 270mm diameter useable area, allowing for multiple 4” wafer depositions in a single run. | ||
| + | *'''Temperature''': Standard operating temperature is 300C, but can be user changed for temps ranging anywhere from 250 to 350C. | ||
| + | *'''Low-Stress Si<sub>3</sub>N<sub>4</sub>''': The system is equipped with a dual generator, dual frequency option for growth of Low-stress Nitride films. | ||
| + | **The Low-Stress Si3N4 film recipe are tested approx. monthly, and kept within ±100MPa. Data can be found at Recipes (below) > [[PECVD Recipes#Historical Data 5|Low-Stress Nitride]]. | ||
| − | == | + | ==See Also== |
| − | * | + | *[http://www.advanced-vacuum.se/Ny-sida-8.html Vision 310 Product Page] |
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| − | == | + | ==Documentation== |
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| + | *[https://wiki.nanotech.ucsb.edu/w/images/2/2c/SOP_for_Advanced_Vacuum_PECVD.pdf Operating Instructions] | ||
| + | *[[Wafer Coating Process Traveler]] | ||
| + | *For particle counting method, see the [[Wafer scanning process traveler|Surfscan Scanning Procedure]] | ||
| − | + | ==Recipes & Historical Data== | |
| − | + | *Recipes can be found on the PECVD Recipes Page: | |
| − | * | + | **[[PECVD Recipes#PECVD 2 .28Advanced Vacuum.29|Recipes > Vacuum Deposition Recipes > PECVD Recipes > '''<u>PECVD 2 - Advanced Vacuum</u>''']] |
| − | * | + | **Thin-Films recorded: SiO2, Si3N4 and Low-Stress Si3N4 |
| − | * | + | **''Historical (Process Control) Data is also shown here.'' |
| − | * | + | *A list of ''all available'' deposited films can be found on the Vacuum Deposition Recipes page: |
| − | * | + | **[[Vacuum Deposition Recipes|Recipes > Vacuum Deposition Recipes]] |
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Revision as of 11:04, 4 November 2021
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About
- Films/Gases: This open-load system is dedicated to PECVD of SiO2, SiNx, SiOxNy, and a-Si using Silane (2%SiH4, 98% He), N2O, NH3, and N2 gases.
- Size: The sample electrode has a 270mm diameter useable area, allowing for multiple 4” wafer depositions in a single run.
- Temperature: Standard operating temperature is 300C, but can be user changed for temps ranging anywhere from 250 to 350C.
- Low-Stress Si3N4: The system is equipped with a dual generator, dual frequency option for growth of Low-stress Nitride films.
- The Low-Stress Si3N4 film recipe are tested approx. monthly, and kept within ±100MPa. Data can be found at Recipes (below) > Low-Stress Nitride.
See Also
Documentation
- Operating Instructions
- Wafer Coating Process Traveler
- For particle counting method, see the Surfscan Scanning Procedure
Recipes & Historical Data
- Recipes can be found on the PECVD Recipes Page:
- Recipes > Vacuum Deposition Recipes > PECVD Recipes > PECVD 2 - Advanced Vacuum
- Thin-Films recorded: SiO2, Si3N4 and Low-Stress Si3N4
- Historical (Process Control) Data is also shown here.
- A list of all available deposited films can be found on the Vacuum Deposition Recipes page: