Difference between revisions of "RIE Etching Recipes"
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==ZnS Etching (RIE 2)== |
==ZnS Etching (RIE 2)== |
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− | *[[media:| |
+ | *[[media:|ZnS Etch Recipe - CH<sub>4</sub>-H<sub>2</sub>-Ar]] |
==ITO Etching (RIE 2)== |
==ITO Etching (RIE 2)== |
Revision as of 10:06, 29 July 2016
Back to Dry Etching Recipes.
RIE 1 (Custom)
RIE 2 (MRC)
CdZnTe Etching (RIE 2)
ZnS Etching (RIE 2)
- [[media:|ZnS Etch Recipe - CH4-H2-Ar]]