Difference between revisions of "S-Cubed Flexi - Operating Procedure"
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(initial secitons, draft only) |
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Revision as of 11:47, 26 August 2020
Work In Progress This article is still under construction. It may contain factual errors. Content is subject to change. |
Only staff & designated maintenance users are allowed to write recipes on this tool! Maintaining low particle counts on this tool is extremely important, so users must strictly follow the training procedures.
Initial
make sure system is not running, is on correct screen etc.
Check liquids
CHeck if nozzle has been cleaned, TBD?
RUn a test wafer, look for uniformity.
Wafer Load
TBD, including check