User contributions
Jump to navigation
Jump to search
- 09:43, 18 May 2022 diff hist +247 m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher still a low etch rate on new fl cal Tag: Visual edit
- 09:41, 18 May 2022 diff hist 0 N File:SiO2 Fl 10 CS 007.jpg current
- 09:41, 18 May 2022 diff hist 0 N File:SiO2 Fl 10 45D-003.jpg current
- 09:48, 12 May 2022 diff hist +186 m Oxford ICP Etcher - Process Control Data added new cal to oxford 60c Tag: Visual edit
- 09:47, 12 May 2022 diff hist 0 N File:Oxford 60c 10 CS 008.jpg current
- 09:47, 12 May 2022 diff hist 0 N File:Oxford 60c 10 45D 003.jpg current
- 08:02, 12 May 2022 diff hist +39 m Oxford ICP Etcher - Process Control Data started to enter new cal on oxford60c Tag: Visual edit
- 09:36, 11 May 2022 diff hist +16 m Test Data of etching SiO2 with CHF3/CF4 added selectivity to ICP2 cals Tag: Visual edit
- 09:33, 11 May 2022 diff hist +241 m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher addded entry to fl cals, added selectivity. etch rate is 10% lower Tag: Visual edit
- 09:28, 11 May 2022 diff hist 0 N File:SiO2 Fl 09 CS 006.jpg current
- 09:28, 11 May 2022 diff hist 0 N File:SiO2 Fl 09 45D 005.jpg current
- 09:24, 11 May 2022 diff hist +227 m Test Data of etching SiO2 with CHF3/CF4-ICP1 added entry in ICP1 cals, added selectivity Tag: Visual edit
- 09:20, 11 May 2022 diff hist 0 N File:ICP1 07 CS 006.jpg current
- 09:20, 11 May 2022 diff hist 0 N File:ICP1 07 45D 008.jpg current
- 07:58, 10 May 2022 diff hist 0 m Test Data of etching SiO2 with CHF3/CF4 fixed typo on icp2 cals Tag: Visual edit
- 11:01, 5 May 2022 diff hist +233 m Oxford ICP Etcher - Process Control Data added new entry to oxford 60c cal Tag: Visual edit
- 10:59, 5 May 2022 diff hist 0 N File:InP Oxford 60c 09 CS 005.jpg current
- 10:59, 5 May 2022 diff hist 0 N File:InP Oxford 60c 09 45D 005.jpg current
- 10:53, 5 May 2022 diff hist +264 Test Data of etching SiO2 with CHF3/CF4 Added new entry to ICP2 cals -- after chuck temperature was lowered Tag: Visual edit
- 10:51, 5 May 2022 diff hist 0 N File:ICP2 07 CS 005.jpg current
- 10:50, 5 May 2022 diff hist 0 N File:ICP2 07 45D 002.jpg current
- 08:09, 4 May 2022 diff hist +220 m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher added entry to FL cals Tag: Visual edit
- 08:08, 4 May 2022 diff hist 0 N File:SiO2 Fl 08 CS 005.jpg current
- 08:07, 4 May 2022 diff hist 0 N File:SiO2 Fl 08 45D 004.jpg current
- 13:15, 28 April 2022 diff hist +220 m Unaxis VLR Etch - Process Control Data added new entry to unaxis cals Tag: Visual edit
- 13:13, 28 April 2022 diff hist 0 N File:Unaxis 03 CS 003.jpg current
- 13:12, 28 April 2022 diff hist 0 N File:Unaxis 03 45D 003.jpg current
- 13:09, 28 April 2022 diff hist +202 m Oxford ICP Etcher - Process Control Data added entry to Oxford 60c cals Tag: Visual edit
- 13:04, 28 April 2022 diff hist 0 N File:Oxford 60c 08 CS 009.jpg current
- 13:04, 28 April 2022 diff hist 0 N File:Oxford 60c 08 45D 003.jpg current
- 10:08, 27 April 2022 diff hist +3,202 m Unaxis VLR Etch - Process Control Data merged the two sets of ICP cal data Tag: Visual edit
- 12:32, 26 April 2022 diff hist +299 m Oxford ICP Etcher - Process Control Data added new entry to oxford 60c cal Tag: Visual edit
- 12:31, 26 April 2022 diff hist 0 N File:Oxford 60c 07 CS 001.jpg current
- 12:30, 26 April 2022 diff hist 0 N File:Oxford 60c 07 45D 002.jpg current
- 12:27, 26 April 2022 diff hist +215 m Test Data of etching SiO2 with CHF3/CF4 added new entry to ICP2 cals Tag: Visual edit
- 12:26, 26 April 2022 diff hist 0 N File:ICP2 06 CS 001.jpg current
- 12:26, 26 April 2022 diff hist 0 N File:ICP2 06 45D 002.jpg current
- 12:24, 26 April 2022 diff hist +213 m Test Data of etching SiO2 with CHF3/CF4-ICP1 added entry to ICP1 cals Tag: Visual edit
- 12:23, 26 April 2022 diff hist 0 N File:ICP1 06 CS 002.jpg current
- 12:22, 26 April 2022 diff hist 0 N File:ICP1 06 45D 002.jpg current
- 10:20, 21 April 2022 diff hist +13 m Unaxis VLR Etch - Process Control Data edited recipe on Unaxis Process control data Tag: Visual edit
- 10:17, 21 April 2022 diff hist +3 m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher fixed typo Tag: Visual edit
- 10:09, 21 April 2022 diff hist +219 m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher added entry to FL cals Tag: Visual edit
- 10:08, 21 April 2022 diff hist 0 N File:SiO2 Fl 07 CS 004.jpg current
- 10:07, 21 April 2022 diff hist 0 N File:SiO2 Fl 07 45D 003.jpg current
- 10:02, 21 April 2022 diff hist +210 m Test Data of etching SiO2 with CHF3/CF4 added new entry to ICP2 cals Tag: Visual edit
- 10:01, 21 April 2022 diff hist 0 N File:ICP2 05 CS 001.jpg current
- 10:00, 21 April 2022 diff hist 0 N File:ICP2 05 45D 003.jpg current
- 09:58, 21 April 2022 diff hist +211 m Test Data of etching SiO2 with CHF3/CF4-ICP1 added entry to ICP1 cals Tag: Visual edit
- 09:57, 21 April 2022 diff hist 0 N File:ICP1 05 CS 002.jpg current
