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UCSB NanoFab Announcements
Stepper #2: Down until Mon Morning
It's been reported that the load arm is malfunctioning and recovery steps are not working. I will take a look at the tool Monday morning. The system is down until further notice. // John d 19:23, 12 May 2018 (PDT)
PECVD#2: Open Soon
The Plasma Therm Cortex software update is complete, and the system is operational. Standard recipes requalified. Particle counts are now much lower and around historical levels. Software has a few issues being worked out. Training will be announced soon. // Thibeault 16:37, 10 May 2018 (PDT)