Template:Announcements
UCSB NanoFab Announcements
NanoFab is OPEN
Fire System and Exhaust work is completed, the lab is open for use. // John d 09:09, 18 May 2018 (PDT)
RIE#5: No SiCl4
We should have a new cylinder of SiCl4 in two weeks. Until then we are out of SiCl4. // John d 21:40, 14 May 2018 (PDT)
Stepper #2: Up
Then turn table issue has been resolved. The system has been calibrated and is ready for your use. // John d 16:19, 16 May 2018 (PDT)
PECVD#2: Open Soon
The Plasma Therm Cortex software update is complete, and the system is operational. Standard recipes requalified. Particle counts are now much lower and around historical levels. Software has a few issues being worked out. The system is still down. PlasmaTherm is here working to resolve the outstanding issues since the software update. I am not sure how long it will take them to have the system operating properly. I will send out an email once I have more information. Training will be announced soon. // John d 16:43, 15 May 2018 (PDT)