Difference between revisions of "UV Ozone Reactor"

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|type = Dry Etch
|type = Dry Etch
|super= Tony Bosch
|super= Lee Sawyer
|location=Bay 5
|location=Bay 5

Revision as of 09:46, 11 April 2019

UV Ozone Reactor
Tool Type Dry Etch
Location Bay 5
Supervisor Lee Sawyer
Supervisor Phone (805) 893-2123
Supervisor E-Mail lee_sawyer@ucsb.edu
Description UV Ozone Reactor
Manufacturer Jelight
Model M-144AX
Dry Etch Recipes


The UV Ozone is manufactured by Jelight, model M-144AX. It can be used for Oxygen activation, etching or oxidation of a surface without ion bombardment.

Operating Procedures