If there is an issue with the tool that requires troubleshooting and recovery, please follow instructions bellow carefully.

Troubleshooting

Most of the errors are listed on the paper that is attached to the tall cabinet. Here are the most common ones:

Please try these things in this order.

Try CTRL C followed by A and Enter. This will abort any command that may have hung up. Fallow instructions ( tall cabinet, printed paper on the wall)
For Reticle Robot Hang Up: See step 25 of start-up procedure

Verify that correct alignment key offset is being used (check sign convention)
Verify that correct pass shift is being used (check sign convention)
If you have DFAS alignment marks, perform a MAP job to verify alignment ( check sign convention)

Perform a focus (EXPO) job using the same type of wafer that you will use for your real job and use the optimal focus offset determined from this job. You may need to look at both exposure time and focus.
If you have been running the same process and now have issues, run SETUP from the : prompt, following the instructions on the GCA Regular Maintenance Sheet.
Verify that you are using correct chuck for a substrate that you are exposing (each chuck has a specific thickness)

Red stage limit light will be lit inside the stepper chamber next to the joystick.
Press the lit limit switch (lower left corner in the environmental chamber) to release the stage.

contact Biljana Stamenic: if it is job related or need some help in using the tool
contact Lee Sawyer: if it is something wrong with the tool/broken
contact Mike Silva if neither Lee Sawyer or Biljana Stamenic can be reached
NOTE: If the tool is down, leave a note by tool. Report the issue on SignupMonkey, by clicking the [Report Tool Issue] button for the AutoStep.

Autostep 200 Troubleshooting and Recovery