Deep UV Optical Microscope (Olympus)
DUV Camera is non-operational and unable to be repaired. Visible camera is still functional. 2022-02
This system does general purpose imaging in the visible and also has high resolution/high magnification DUV imaging using 250 nm light. Surface features less than 100nm can be resolved.
The system has precision motorized stage control and is fully computer controlled for image capture and sample manipulation.
A Good system for CD measurements on wafer (250nm and above) without entry into the SEM.
- Microscope Objectives:
- 5x, 10x, 20x, 50x, 100x, DUV-100x
- Software Control:
- Motorized Stage & Objective Turret
- Calibrated Measurements (calibrations fixed)
- Z-motor (focus height) measurement
- Bright Field / Dark Field (visible only)
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