E-Beam 1 - 4-inch, 4-wafer Fixture SOP

Loading Four 4-inch wafers for normal-incidence deposition on E-Beam Evaporator #1.

This fixture works well for Lift-off, because the angles on the fixture is designed to be perpendicular to the point-source deposition source. Staff routinely uses this holder for Lift-off.

Procedure

1. Mount your wafers to the 4-wafer fixture while it is NOT installed in the tool. Like so - setup the fixture on the table:
   
2. Insert a ~1-inch long 1/4-20 Bolt from the underside, with a 1/4-20 Nut on the top side, like so:
   
3. Insert your wafers Face-Down and secure them with the CuBe Clips:
   

   CORRECTION - 1/4-20 bolt + nut may be inserted in center already.
4. Load into tool, securing at the top with the single 1/4-20 bolt + nut, and Ensuring the Crystal Monitor does not shadow any wafers, as pictured here: