File:Cal vs Legacy DSE.png

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Cal_vs_Legacy_DSE.png ‎(712 × 456 pixels, file size: 20 KB, MIME type: image/png)

Summary

Legacy DSE Si etch (Plasma-Therm Standard DSE) vs new Calibration Si etch (STD_Bosch_Si) looking at Etch rate dependence on Aspect Ratio.

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Date/TimeThumbnailDimensionsUserComment
current20:32, 8 October 2024Thumbnail for version as of 20:32, 8 October 2024712 × 456 (20 KB)Noahdutra (talk | contribs)Legacy DSE Si etch (Plasma-Therm Standard DSE) vs new Calibration Si etch (STD_Bosch_Si) looking at Etch rate dependence on Aspect Ratio.

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