MA6 Backside Alignment - Allowed Mark Locations

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To allow for Backside alignment, you must place your back-side alignment marks, and photomask alignment marks in a location that can be viewed through the cutouts in the wafer chuck, and that the backside cameras are able to drive to.

4-inch Wafer - BSA Cutouts

Photo of 100mm vacuum chuck, with measurements of the cutouts.
Measurements showing location of BSA cutouts on 100-mm wafer chuck. Click to zoom on measurements.