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  • Sputter 3 (AJA ATC 2000-F)
    |super= Tony Bosch |email=bosch@ece.ucsb.edu
    3 KB (479 words) - 17:36, 30 August 2022
  • ICP Etching Recipes
    ==High Rate Bosch Etch (DSEIII)== ...Example 01.png|alt=Example SEM image|thumb|188x188px|Example of 100µm Deep Bosch Etched Silicon posts with hard mask. Close inspection shows the horizontal
    32 KB (5,100 words) - 19:46, 22 April 2025
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