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- |super= Tony Bosch |email=bosch@ece.ucsb.edu ...3 KB (479 words) - 17:36, 30 August 2022
- ==High Rate Bosch Etch (DSEIII)== ...Example 01.png|alt=Example SEM image|thumb|188x188px|Example of 100µm Deep Bosch Etched Silicon posts with Al<sub>2</sub>O<sub>3</sub> hard mask. Close insp ...42 KB (6,762 words) - 00:18, 3 March 2026
- ...he entire PMGI - because PMGI absorbs DUV very strongly so the light doesn't penetrate to the bottom of thick PMGI on the first exposure. |+''Ask [[Tony Bosch|Staff]] if you need a new recipe.'' ...33 KB (4,815 words) - 23:05, 4 February 2026