Stepper 1 (GCA6300) How to select proper chuck
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| GCA 6300 CHUCKS | ||
| Chuck Name/Wafer Size | Substrate Thickness | Chuck Thickness |
| 1/4 of 2"(and smaller) | ~717um (+/-100) | 5.404mm |
| 1/4 of 2"(and smaller) | ~317um (+/-100) | with pink shim(0.40mm)=5.804mm |
| 1/4 of 2"(and smaller) | ~487um (+/-100) | with metal shim(0.23mm)=5.634mm |
| 2" (and smaller) | ~596um (+/-100) | 5.525mm |
| 3" (and smaller) | ~685um (+/-100) | 5.436mm |
| 4" (and smaller) | ~520um (+/-100) | 5.601mm |
| 4" (and smaller) | ~520um (+/-100) | 5.601mm |
| TARGET THICKNESS: ~6.121mm +/- 0.1mm (100um) | ||
| Target Thickness=Chuck Thickness+Wafer Thickness | ||
| Limits on Hight/Focus Dispay on Voltmeter ( +/- 10V), Ideal ≈ 0V | ||
| NOTE: DO NOT OVER TIGHTEN SCREWS! | ||
| Please be careful tightening the screws while using shims with the stepper chucks. It is easy to over tighten the screws and strip out the chucks. Also, if you notice a screw head is being stripped, please discard the screw and use a new one. | ||