Stepper 1 (GCA 6300) Substrate Thickness, Shim Thickness ans Target Thickness
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| SUBSTRATE | LOADING/CHUCK | STEPPER | WAFER | TARGET THICKNESS | COMMENT | |||||
| Substrate size | CHUCK name | Substarte Thickness=S | Pick right chuck | Shim | chuck size | wafer size | Chuck tickness=C | C+S=6.121mm ( +/- 0.100) | ||
| 1/4 of 2" | SMALL 1/4 of 2" | 300um=0.300mm | 1/4 of 2"+pink shim | 400um | 3 (for ≤3" substrate ) | 50.8mm | 5.804mm | 5.804+0.300=6.104mm | OK | |
| or less | 350um=0.350mm | 1/4 of 2"+pink shim | 400um | 3 (for ≤3" substrate ) | 50.8mm | 5.804mm | 5.804+0.350=6.154mm | OK | ||
| 420um=0.420mm | 1/4 of 2"+pink shim | 400um | 3 (for ≤3" substrate ) | 50.8mm | 5.804mm | 5.804+0.420=6.224mm | OK | limit | ||
| 350um=0.350mm | 1/4 of 2"+metal shim | 380um | 3 (for ≤3" substrate ) | 50.8mm | 5.404mm | 5.404+0.380+0.350=6.134mm | OK | ≤350um, use shim 260-380um | ||
| 500um=0.500mm | 1/4 of 2"+metal shim | 230um | 3 (for ≤3" substrate ) | 50.8mm | 5.404mm | 5.404+0.500+0.230=6.134mm | OK | ≥500um use shim 230-260um | ||
| 620um=620mm | 1/4 of 2" | no | 3 (for ≤3" substrate ) | 50.8mm | 5.404mm | 5.404+0.620=6.024mm | OK | limit | ||
| 820um=820mm | 1/4 of 2" | no | 3 (for ≤3" substrate ) | 50.8mm | 5.404mm | 5.404+0.820=6.224mm | OK | limit | ||
| 2" | SMALL 2" | 300um=0.300mm | 2"/500um+shim | 230um | 3 (for ≤3" substrate ) | 50.8mm | 5.525mm | 5.525+0.300+0.230=6.055mm | OK | limit |
| 300um=0.300mm | 2"/500um+shim | 240um | 3 (for ≤3" substrate ) | 50.8mm | 5.525mm | 5.525+0.300+0.240=6.065mm | OK | |||
| 300um=0.300mm | 2"/500um+shim | 260um | 3 (for ≤3" substrate ) | 50.8mm | 5.525mm | 5.525+0.300+0.260=6.085mm | OK | |||
| 300um=0.300mm | 2"/500um+shim | 380um | 3 (for ≤3" substrate ) | 50.8mm | 5.525mm | 5.525+0.300+0.380=6.205mm | OK | limit | ||
| 350um=0.350mm | 2"/500um+shim | 230um | 3 (for ≤3" substrate ) | 50.8mm | 5.525mm | 5.525+0.350+0.230=6.105mm | OK | <350um, use shim 230-260um | ||
| 500um=0.500mm | 2"/500um | no | 3 (for ≤3" substrate ) | 50.8mm | 5.525mm | 5.525+0.500=6.025mm | OK | limit | ||
| 635um=0.630mm | 2"/500um | no | 3 (for ≤3" substrate ) | 50.8mm | 5.525mm | 5.525+0.635=6.160mm | OK | |||
| 700um=0.700mm | 2"/500um | no | 3 (for ≤3" substrate ) | 50.8mm | 5.525mm | 5.525+0.700=6.225mm | OK | limit | ||
| 3" | METAL 3" | 300um=0.300mm | 76mm/635um+shim | 380um | 3 (for ≤3" substrate ) | 76.2mm | 5.436mm | 5.436+0.300+0.380=6.116mm | OK | |
| 350um=0.350mm | 76mm/635um+shim | 380um | 3 (for ≤3" substrate ) | 76.2mm | 5.436mm | 5.436+0.350+0.380=6.166mm | OK | ≤350um, use shim 380um | ||
| 500um=0.500mm | 76mm/635um+shim | 230um | 3 (for ≤3" substrate ) | 76.2mm | 5.436mm | 5.436+0.500+0.230=6.166mm | OK | |||
| 500um=0.500mm | 76mm/635um+shim | 240um | 3 (for ≤3" substrate ) | 76.2mm | 5.436mm | 5.436+0.500+0.240=6.176mm | OK | |||
| 500um=0.500mm | 76mm/635um+shim | 260um | 3 (for ≤3" substrate ) | 76.2mm | 5.436mm | 5.436+0.500+0.260=6.196mm | OK | |||
| 585um=0.720mm | 76mm/635um | no | 3 (for ≤3" substrate ) | 76.2mm | 5.436mm | 5.436+0.585=6.021mm | OK | limit | ||
| 635um=0.635mm | 76mm/635um | no | 3 (for ≤3" substrate ) | 76.2mm | 5.436mm | 5.436+0.635=6.071mm | OK | |||
| 785um=0.720mm | 76mm/635um | no | 3 (for ≤3" substrate ) | 76.2mm | 5.436mm | 5.436+0.785=6.221mm | OK | limit | ||
| 4" | STANDARD | 300um=0.300mm | 4"/500um+shim | 230um | 100 ( for 4", metal chuck) | 100mm | 5.601mm | 5.601+0.300+0.230=6.131mm | OK | ≤350um, use shim 230-260um |
| 300um=0.300mm | 4"/500um+shim | 240um | 100 ( for 4", metal chuck) | 100mm | 5.601mm | 5.601+0.300+0.240=6.141mm | OK | |||
| 300um=0.300mm | 4"/500um+shim | 260um | 100 ( for 4", metal chuck) | 100mm | 5.601mm | 5.601+0.300+0.260=6.161mm | OK | |||
| 300um=0.300mm | 4"/500um+shim | 380um | 100 ( for 4", metal chuck) | 100mm | 5.601mm | 5.601+0.300+0.380=6.281mm | NO | |||
| 350um=0.350mm | 4"/500um+shim | 230um | 100 ( for 4", metal chuck) | 100mm | 5.601mm | 5.601+0.350+0.230=6.181mm | OK | |||
| 350um=0.350mm | 4"/500um+shim | 240um | 100 ( for 4", metal chuck) | 100mm | 5.601mm | 5.601+0.350+0.240=6.191mm | OK | |||
| 350um=0.350mm | 4"/500um+shim | 260um | 100 ( for 4", metal chuck) | 100mm | 5.601mm | 5.601+0.350+0.260=6.211mm | OK | limit | ||
| 350um=0.300mm | 4"/500um+shim | 380um | 100 ( for 4", metal chuck) | 100mm | 5.601mm | 5.601+0.350+0.380=6.331mm | NO | |||
| 420um=0.620mm | 4"/500um | no | 100 ( for 4", metal chuck) | 100mm | 5.601mm | 5.601+0.420=6.021mm | OK | limit | ||
| 500um=0.500mm | 4"/500um | no | 100 ( for 4", metal chuck) | 100mm | 5.601mm | 5.601+0.500=6.101mm | OK | |||
| 620um=0.620mm | 4"/500um | no | 100 ( for 4", metal chuck) | 100mm | 5.601mm | 5.601+0.620=6.221mm | OK | limit | ||
| 4" | METAL 4" | 300um=0.300mm | 4"/300um+shim | 230um | 100 ( for 4", metal chuck) | 100mm | 5.601mm | 5.601+0.300+0.230=6.131mm | OK | ≤350um, use shim 230-260um |
| 300um=0.300mm | 4"/300um+shim | 240um | 100 ( for 4", metal chuck) | 100mm | 5.601mm | 5.601+0.300+0.240=6.141mm | OK | |||
| 300um=0.300mm | 4"/300um+shim | 260um | 100 ( for 4", metal chuck) | 100mm | 5.601mm | 5.601+0.300+0.260=6.161mm | OK | |||
| 300um=0.300mm | 4"/300um+shim | 380um | 100 ( for 4", metal chuck) | 100mm | 5.601mm | 5.601+0.300+0.380=6.281mm | NO | |||
| 350um=0.350mm | 4"/300um+shim | 230um | 100 ( for 4", metal chuck) | 100mm | 5.601mm | 5.601+0.350+0.230=6.181mm | OK | |||
| 350um=0.350mm | 4"/300um+shim | 240um | 100 ( for 4", metal chuck) | 100mm | 5.601mm | 5.601+0.350+0.240=6.191mm | OK | |||
| 350um=0.350mm | 4"/300um+shim | 260um | 100 ( for 4", metal chuck) | 100mm | 5.601mm | 5.601+0.350+0.260=6.211mm | OK | limit | ||
| 350um=0.300mm | 4"/300um+shim | 380um | 100 ( for 4", metal chuck) | 100mm | 5.601mm | 5.601+0.350+0.380=6.331mm | NO | |||
| 500um=0.500mm | 4"/300um | no | 100 ( for 4", metal chuck) | 100mm | 5.601mm | 5.601+0.500=6.101mm | OK | |||
| 620um=0.620mm | 4"/500um | no | 100 ( for 4", metal chuck) | 100mm | 5.601mm | 5.601+0.620=6.221mm | OK | limit | ||
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