Surfscan SOP for 8inch wafers

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Important Guidelines

●      Wafer Thickness: Do not use wafers thicker than 1 mm.

●      Always log off after completing your session.

●      Log all scans and issues in the logbook after use.

Procedure

1. Login Instructions

●      Access Code: fab (new password from 2025].

●      If the keyboard isn’t functional, use the virtual keyboard on the monitor.

●      Double-click the SCAN icon to launch the software.

2. Loading a Recipe

  1. Navigate to Recipe > Load (upper-left corner).
  2. Select one of the standard recipes for 8-inch wafers:

○      STD_UCSB_8INCH_G2 (1.6–28 µm).

○      STD_UCSB_8INCH_G4 (0.16–1.6 µm).

  1. Do not make any changes in the recipe.
  2. Click OK. The recipe name will appear at the top of the screen.

3. Customizing a Recipe

  1. Select Recipe > Save as and name the recipe (e.g., your name or company name).
  2. Select Recipe > View/Modify to adjust the following parameters:

○      Wafer diameter

○      Edge exclusion

○      Gain

○      Threshold

○      Indexer

  1. Under Bin Split, click Default Bin to apply changes.
  2. Save the updated recipe.

4. Loading Wafers

  1. Use the black cassette for 8-inch wafers.
  2. Load the wafers with the face up, and the major flat away from you.
  3. Place the cassette in the left indexer (specific for 8-inch wafers).
  4. Ensure the cassette is seated properly.
  5. On the monitor, select CASS (Cassette) and wait for the tool to detect the wafers.

5. Scanning Wafers

To Scan a Single Wafer:

●      Select the desired wafer from the monitor.

●      Click START (upper menu bar).

●      Wait for the scan to finish and record the results.

To Scan Multiple Wafers:

●      Select AUTO mode.

●      Click START to begin scanning all wafers in the cassette.

6. After Scanning

  1. Once the scan is complete:

○      Press ENTER on the small laptop to save the scan as a photo.

○      Location: Desktop/Local Disk(C)/Users/Public/Public Documentation.

○      Photos can be accessed/downloaded via the Nanofab server.

○      Note: Full data-saving functionality will be available in January 2025.

  1. Click HOME, select RECIPE/Exit, and log off.

Reminders

●      Always ensure the cassette is seated properly in the left indexer.

●      Log off after completing your session.

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