Stepper 3 (ASML DUV): Revision history

21 February 2025

• curprev 23:2723:27, 21 February 2025‎ John d talk contribs‎ 13,841 bytes −135‎ →‎Mask Design and CAD files: removed separate mask making page, instead updated the "generic" page Tag: Visual edit
• curprev 21:5121:51, 21 February 2025‎ John d talk contribs‎ 13,976 bytes +327‎ →‎Mask Design and CAD files: link to ASML mask making (public) Tag: Visual edit

15 February 2025

• curprev 00:1300:13, 15 February 2025‎ John d talk contribs‎ 13,649 bytes +444‎ →‎Optical Proximity Correction (OPC): Going below resolution limit: update o "rule-based OPC" and other minor updates Tag: Visual edit

14 February 2025

• curprev 21:3121:31, 14 February 2025‎ John d talk contribs‎ m 13,205 bytes +18‎ Renamed job creator to mention Python script in TOC Tag: Visual edit
• curprev 07:5507:55, 14 February 2025‎ John d talk contribs‎ 13,187 bytes +66‎ →‎Optical Proximity Correction (OPC): Going below resolution limit: moved Gopi's doc to top and highlighted and listed author Tag: Visual edit

8 February 2025

• curprev 18:0618:06, 8 February 2025‎ John d talk contribs‎ m 13,121 bytes +16‎ →‎Optical Proximity Correction (OPC): Going below resolution limit Tag: Visual edit
• curprev 18:0518:05, 8 February 2025‎ John d talk contribs‎ m 13,105 bytes −8‎ →‎Optical Proximity Correction (OPC): Going below resolution limit Tag: Visual edit
• curprev 18:0418:04, 8 February 2025‎ John d talk contribs‎ m 13,113 bytes −3‎ →‎Optical Proximity Correction (OPC): Going below resolution limit Tag: Visual edit
• curprev 17:2217:22, 8 February 2025‎ John d talk contribs‎ 13,116 bytes +216‎ →‎Optical Proximity Correction (OPC): Going below resolution limit: centered images Tag: Visual edit: Switched
• curprev 01:1401:14, 8 February 2025‎ John d talk contribs‎ m 12,900 bytes +41‎ →‎Optical Proximity Correction (OPC): Going below resolution limit Tag: Visual edit
• curprev 01:1201:12, 8 February 2025‎ John d talk contribs‎ m 12,859 bytes +82‎ →‎Optical Proximity Correction (OPC): Going below resolution limit Tag: Visual edit

7 February 2025

• curprev 23:5023:50, 7 February 2025‎ John d talk contribs‎ m 12,777 bytes +56‎ →‎Optical Proximity Correction: Going below resolution limit: link to skyler's google scholar Tag: Visual edit
• curprev 23:4523:45, 7 February 2025‎ John d talk contribs‎ m 12,721 bytes +36‎ →‎Optical Proximity Correction: Going below resolution limit
• curprev 23:4323:43, 7 February 2025‎ John d talk contribs‎ 12,685 bytes +784‎ →‎UCSB Photomasks Available: added Skyler's OPC images. Tag: Visual edit
• curprev 00:3000:30, 7 February 2025‎ John d talk contribs‎ m 11,901 bytes +170‎ →‎Optical Proximity Correction: Going below resolution limit Tag: Visual edit
• curprev 00:2700:27, 7 February 2025‎ John d talk contribs‎ m 11,731 bytes +63‎ →‎Optical Proximity Correction: Going below resolution limit Tag: Visual edit

6 February 2025

• curprev 23:4123:41, 6 February 2025‎ John d talk contribs‎ 11,668 bytes +556‎ →‎Optical Proximity Correction: Going below resolution limit: added table of images Tag: Visual edit

30 January 2025

• curprev 23:4523:45, 30 January 2025‎ John d talk contribs‎ 11,112 bytes +113‎ tutorial explanation Tag: Visual edit

27 January 2025

• curprev 20:0020:00, 27 January 2025‎ Gopimeena talk contribs‎ 10,999 bytes +3‎ →‎UCSB Photomasks Available Tag: Visual edit
• curprev 19:5819:58, 27 January 2025‎ Gopimeena talk contribs‎ 10,996 bytes +504‎ →‎Design Tools Tag: Visual edit

3 January 2025

• curprev 02:3802:38, 3 January 2025‎ John d talk contribs‎ 10,492 bytes +161‎ →‎Design Tools: link to Job Creator Tag: Visual edit

27 November 2024

• curprev 05:4305:43, 27 November 2024‎ John d talk contribs‎ 10,331 bytes +165‎ →‎Maximum Wafer Bow: explain stress comp better Tag: Visual edit

26 October 2024

• curprev 19:2619:26, 26 October 2024‎ John d talk contribs‎ 10,166 bytes +339‎ →‎Recipes: added FEM analysis link Tag: Visual edit
• curprev 18:4218:42, 26 October 2024‎ John d talk contribs‎ 9,827 bytes +152‎ →‎Operating Procedures: moved login issue to new page. Tag: Visual edit

20 September 2024

• curprev 18:4018:40, 20 September 2024‎ John d talk contribs‎ 9,675 bytes +188‎ →‎About: link to stepper tutorial, fixed mask making guidelines link Tag: Visual edit

19 July 2024

• curprev 19:3319:33, 19 July 2024‎ John d talk contribs‎ m 9,487 bytes −1‎ →‎Design Tools Tag: Visual edit
• curprev 19:3319:33, 19 July 2024‎ John d talk contribs‎ 9,488 bytes +116‎ →‎Design Tools: link to new Generic Stepper programming page. Tag: Visual edit

3 May 2024

• curprev 20:0820:08, 3 May 2024‎ John d talk contribs‎ m 9,372 bytes +1‎ →‎Operating Procedures Tag: Visual edit
• curprev 20:0720:07, 3 May 2024‎ John d talk contribs‎ 9,371 bytes −884‎ →‎Operating Procedures: deleted links to video training, point instead to gDrive doc (access-restricted). Tag: Visual edit
• curprev 19:5919:59, 3 May 2024‎ John d talk contribs‎ 10,255 bytes +268‎ →‎Operating Procedures: updates to wording Tag: Visual edit

10 April 2024

• curprev 00:0000:00, 10 April 2024‎ John d talk contribs‎ m 9,987 bytes +10‎ →‎Operating Procedures Tag: Visual edit

13 March 2024

• curprev 10:2710:27, 13 March 2024‎ John d talk contribs‎ 9,977 bytes −1,261‎ removed Wiki-hosted ASML procedures, linked to gDrive procedures (access restricted) Tag: Visual edit

13 February 2024

• curprev 00:4300:43, 13 February 2024‎ John d talk contribs‎ m 11,238 bytes +7‎ →‎General Capabilities/Overview: fixed link Tag: Visual edit
• curprev 00:4100:41, 13 February 2024‎ John d talk contribs‎ 11,231 bytes +295‎ link to stepper vs. contact litho PPT Tag: Visual edit

22 January 2024

• curprev 20:5820:58, 22 January 2024‎ John d talk contribs‎ 10,936 bytes −203‎ →‎Design Tools: moved JobCreator into software section, highlighted Mask Making page Tag: Visual edit

13 January 2024

• curprev 01:4101:41, 13 January 2024‎ John d talk contribs‎ 11,139 bytes +377‎ →‎Online Video Trainings: updated panopto login instructions Tag: Visual edit

22 December 2023

• curprev 18:2418:24, 22 December 2023‎ John d talk contribs‎ 10,762 bytes +17‎ →‎Process Information: made wafer bow it's own section Tag: Visual edit

1 December 2023

• curprev 17:2817:28, 1 December 2023‎ John d talk contribs‎ m 10,745 bytes +35‎ →‎Process Information: DO NOT RUN wafer with too high bow Tag: Visual edit

29 September 2023

• curprev 21:5121:51, 29 September 2023‎ John d talk contribs‎ 10,710 bytes +321‎ →‎Online Video Trainings: privatized the Video Trianings, note on how to reaquire access. Tag: Visual edit

13 September 2023

• curprev 19:4619:46, 13 September 2023‎ John d talk contribs‎ m 10,389 bytes +4‎ →‎Process Information Tag: Visual edit
• curprev 19:4519:45, 13 September 2023‎ John d talk contribs‎ 10,385 bytes +546‎ →‎Process Information: Updated Wafer Bow requirements Tag: Visual edit

20 August 2023

• curprev 18:1418:14, 20 August 2023‎ John d talk contribs‎ 9,839 bytes +84‎ →‎Process Information: added maximu. Dose & disallowed EVL PR’s Tag: Visual edit
• curprev 18:0818:08, 20 August 2023‎ John d talk contribs‎ 9,755 bytes +177‎ Added KrF and some more info on piece part, and removed unnecessary heading Tag: Visual edit

7 August 2023

• curprev 19:5019:50, 7 August 2023‎ John d talk contribs‎ 9,578 bytes +119‎ added minimum wafer thickness Tag: Visual edit

25 May 2023

• curprev 18:3318:33, 25 May 2023‎ John d talk contribs‎ 9,459 bytes +118‎ →‎Resists Used: mnetiuon EBL compatibility Tag: Visual edit
• curprev 18:3118:31, 25 May 2023‎ John d talk contribs‎ 9,341 bytes +35‎ →‎About: separated "resist info" to it's own heading Tag: Visual edit

18 May 2023

• curprev 23:4023:40, 18 May 2023‎ John d talk contribs‎ m 9,306 bytes +1‎ →‎Process Control Data Tag: Visual edit
• curprev 23:4023:40, 18 May 2023‎ John d talk contribs‎ m 9,305 bytes −1‎ →‎Process Control Data
• curprev 23:3923:39, 18 May 2023‎ John d talk contribs‎ m 9,306 bytes +254‎ →‎Process Control Data Tag: Visual edit
• curprev 23:3723:37, 18 May 2023‎ John d talk contribs‎ m 9,052 bytes +209‎ →‎Process Control Data: images link to data now