Stepper 3 (ASML DUV): Revision history

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curprev 00:2400:24, 10 October 2025 John d talk contribs 15,514 bytes +18 →Stepper #3 Training/Reference Videos Tag: Visual edit

curprev 06:4406:44, 5 October 2025 John d talk contribs m 15,496 bytes −18 →Operating Procedures Tag: Visual edit
curprev 06:4306:43, 5 October 2025 John d talk contribs 15,514 bytes +120 →Operating Procedures: headings for each docusment Tag: Visual edit

curprev 18:2118:21, 3 October 2025 John d talk contribs m 15,394 bytes +25 →Calibrating your Lithography Process Tag: Visual edit

curprev 05:3005:30, 19 July 2025 John d talk contribs 15,369 bytes +469 →Operating Procedures: added link to troubleshooting + error recovery doc Tag: Visual edit

curprev 02:4602:46, 29 April 2025 John d talk contribs 14,900 bytes +144 →Design Tools: link to advanced reticle design Tag: Visual edit
curprev 02:4102:41, 29 April 2025 John d talk contribs 14,756 bytes +259 →About: link to advnaced stepper layout Tag: Visual edit

curprev 18:3818:38, 22 April 2025 John d talk contribs 14,497 bytes +401 →Operating Procedures: linked to FEM docs Tag: Visual edit

curprev 00:1600:16, 18 April 2025 John d talk contribs 14,096 bytes 0 →UCSB Photomasks Available Tag: Visual edit
curprev 00:1600:16, 18 April 2025 John d talk contribs 14,096 bytes +207 →UCSB Photomasks Available Tag: Visual edit
curprev 00:1400:14, 18 April 2025 John d talk contribs m 13,889 bytes +40 →UCSB Photomasks Available Tag: Visual edit

curprev 19:2019:20, 12 April 2025 John d talk contribs m 13,849 bytes −11 →Optical Proximity Correction (OPC): Going below the resolution limit Tag: Visual edit

curprev 17:5117:51, 8 April 2025 John d talk contribs m 13,860 bytes −6 No edit summary Tag: Visual edit
curprev 17:5117:51, 8 April 2025 John d talk contribs 13,866 bytes +25 →General Capabilities/Overview: moved stepper tutorial to it's own subheading Tag: Visual edit

curprev 23:2723:27, 21 February 2025 John d talk contribs 13,841 bytes −135 →Mask Design and CAD files: removed separate mask making page, instead updated the "generic" page Tag: Visual edit
curprev 21:5121:51, 21 February 2025 John d talk contribs 13,976 bytes +327 →Mask Design and CAD files: link to ASML mask making (public) Tag: Visual edit

curprev 00:1300:13, 15 February 2025 John d talk contribs 13,649 bytes +444 →Optical Proximity Correction (OPC): Going below resolution limit: update o "rule-based OPC" and other minor updates Tag: Visual edit

curprev 21:3121:31, 14 February 2025 John d talk contribs m 13,205 bytes +18 Renamed job creator to mention Python script in TOC Tag: Visual edit
curprev 07:5507:55, 14 February 2025 John d talk contribs 13,187 bytes +66 →Optical Proximity Correction (OPC): Going below resolution limit: moved Gopi's doc to top and highlighted and listed author Tag: Visual edit

curprev 23:4123:41, 6 February 2025 John d talk contribs 11,668 bytes +556 →Optical Proximity Correction: Going below resolution limit: added table of images Tag: Visual edit

curprev 23:4523:45, 30 January 2025 John d talk contribs 11,112 bytes +113 tutorial explanation Tag: Visual edit

curprev 20:0020:00, 27 January 2025 Gopimeena talk contribs 10,999 bytes +3 →UCSB Photomasks Available Tag: Visual edit
curprev 19:5819:58, 27 January 2025 Gopimeena talk contribs 10,996 bytes +504 →Design Tools Tag: Visual edit

curprev 02:3802:38, 3 January 2025 John d talk contribs 10,492 bytes +161 →Design Tools: link to Job Creator Tag: Visual edit

curprev 05:4305:43, 27 November 2024 John d talk contribs 10,331 bytes +165 →Maximum Wafer Bow: explain stress comp better Tag: Visual edit

curprev 19:2619:26, 26 October 2024 John d talk contribs 10,166 bytes +339 →Recipes: added FEM analysis link Tag: Visual edit
curprev 18:4218:42, 26 October 2024 John d talk contribs 9,827 bytes +152 →Operating Procedures: moved login issue to new page. Tag: Visual edit

curprev 18:4018:40, 20 September 2024 John d talk contribs 9,675 bytes +188 →About: link to stepper tutorial, fixed mask making guidelines link Tag: Visual edit

curprev 19:3319:33, 19 July 2024 John d talk contribs m 9,487 bytes −1 →Design Tools Tag: Visual edit
curprev 19:3319:33, 19 July 2024 John d talk contribs 9,488 bytes +116 →Design Tools: link to new Generic Stepper programming page. Tag: Visual edit

curprev 20:0820:08, 3 May 2024 John d talk contribs m 9,372 bytes +1 →Operating Procedures Tag: Visual edit
curprev 20:0720:07, 3 May 2024 John d talk contribs 9,371 bytes −884 →Operating Procedures: deleted links to video training, point instead to gDrive doc (access-restricted). Tag: Visual edit
curprev 19:5919:59, 3 May 2024 John d talk contribs 10,255 bytes +268 →Operating Procedures: updates to wording Tag: Visual edit

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