Plasma Activation (EVG 810): Revision history

24 October 2024

• curprev 17:1817:18, 24 October 2024‎ John d talk contribs‎ 2,141 bytes +363‎ →‎Examples: added more description of the example process Tag: Visual edit
• curprev 17:1517:15, 24 October 2024‎ John d talk contribs‎ 1,778 bytes +411‎ added wafer bond example. Tag: Visual edit
• curprev 16:3416:34, 24 October 2024‎ John d talk contribs‎ 1,367 bytes +138‎ note on "no PR" Tag: Visual edit

30 October 2023

• curprev 18:0618:06, 30 October 2023‎ Sawyer l talk contribs‎ 1,229 bytes −1‎ SOP rev Tag: Visual edit

15 September 2022

• curprev 19:0619:06, 15 September 2022‎ Sawyer l talk contribs‎ 1,230 bytes 0‎ Updated SOP Tag: Visual edit

30 August 2022

• curprev 17:5417:54, 30 August 2022‎ Silva talk contribs‎ 1,230 bytes +24‎ No edit summary

3 January 2022

• curprev 17:2517:25, 3 January 2022‎ Sawyer l talk contribs‎ 1,206 bytes −20‎ SOP update Tag: Visual edit

7 April 2020

• curprev 01:3201:32, 7 April 2020‎ Jcrode talk contribs‎ 1,226 bytes +2‎ Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/"

9 October 2019

• curprev 21:1621:16, 9 October 2019‎ Sawyer l talk contribs‎ 1,224 bytes +90‎ No edit summary Tag: Visual edit
• curprev 21:1521:15, 9 October 2019‎ Sawyer l talk contribs‎ 1,134 bytes +21‎ updated SOP & added recipe editing SOP Tag: Visual edit

11 September 2019

• curprev 22:1722:17, 11 September 2019‎ John d talk contribs‎ 1,113 bytes +146‎ link to recipes page, not yet fixed Tool info link Tag: Visual edit
• curprev 22:1022:10, 11 September 2019‎ Sawyer l talk contribs‎ 967 bytes +6‎ cosmetic Tag: Visual edit
• curprev 22:0022:00, 11 September 2019‎ Sawyer l talk contribs‎ 961 bytes +25‎ No edit summary Tag: Visual edit
• curprev 21:3421:34, 11 September 2019‎ Sawyer l talk contribs‎ 936 bytes +51‎ linked to file Tag: Visual edit
• curprev 21:3321:33, 11 September 2019‎ Sawyer l talk contribs‎ 885 bytes +68‎ added sop Tag: Visual edit

21 August 2019

• curprev 23:3023:30, 21 August 2019‎ Hopkins a talk contribs‎ 817 bytes +190‎ →‎Detailed Specifications

20 August 2019

• curprev 17:2117:21, 20 August 2019‎ Sawyer l talk contribs‎ 627 bytes −8‎ →‎About: updated owner info Tag: Visual edit

11 July 2012

• curprev 13:4213:42, 11 July 2012‎ Zwarburg talk contribs‎ 635 bytes +11‎ No edit summary
• curprev 13:4013:40, 11 July 2012‎ Zwarburg talk contribs‎ m 624 bytes 0‎ moved Plasma Activation Tool (EVG 810) to Plasma Activation (EVG 810)

1 July 2012

• curprev 14:3514:35, 1 July 2012‎ Zwarburg talk contribs‎ 624 bytes +624‎ Created page with "{{tool|{{PAGENAME}} |picture=EVG.jpg |type = Dry Etch |super= Aidan Hopkins |phone= 805-893-3918x208 |location=Bay 7 |email=hopkins@ece.ucsb.edu |description = Plasma Surface Act…"