RIE Etching Recipes: Revision history

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curprev 22:3722:37, 6 August 2024‎ John d talk contribs‎ 1,239 bytes −390‎ moved RIE3 to Decomm'd tools page Tag: Visual edit

curprev 17:0217:02, 14 June 2021‎ John d talk contribs‎ m 1,629 bytes −1‎ →‎Photoresist and ARC (RIE 5) Tag: Visual edit
curprev 17:0117:01, 14 June 2021‎ John d talk contribs‎ 1,630 bytes +256‎ →‎Photoresist and ARC: added tool name to header title Tag: Visual edit

curprev 04:2604:26, 17 September 2019‎ Thibeault talk contribs‎ 1,374 bytes −23‎ No edit summary

curprev 01:1201:12, 29 September 2018‎ John d talk contribs‎ 1,397 bytes +208‎ →‎RIE 5 (PlasmaTherm): added Photoressit & ARC etching, copied from DUV Litho recipes page Tag: Visual edit

curprev 22:5922:59, 13 January 2017‎ Ningcao talk contribs‎ 1,189 bytes +34‎ →‎RIE 3 (MRC)
curprev 22:5822:58, 13 January 2017‎ Ningcao talk contribs‎ 1,155 bytes 0‎ →‎RIE 3 (MRC)
curprev 22:5822:58, 13 January 2017‎ Ningcao talk contribs‎ 1,155 bytes +119‎ →‎RIE 3 (MRC)

curprev 18:3518:35, 2 August 2016‎ Ningcao talk contribs‎ 1,036 bytes +34‎ →‎SiO2 Etching (RIE 3)
curprev 18:3318:33, 2 August 2016‎ Ningcao talk contribs‎ 1,002 bytes −31‎ →‎SiO2 Etching (RIE 3)

curprev 00:0900:09, 24 October 2013‎ Thibeault talk contribs‎ 775 bytes +10‎ →‎RIE 5 (PlasmaTherm)
curprev 00:0500:05, 24 October 2013‎ Thibeault talk contribs‎ 765 bytes +121‎ →‎RIE 2 (MRC)

curprev 18:1718:17, 27 September 2013‎ Ningcao talk contribs‎ 321 bytes +20‎ →‎CdZnTe Etching (RIE 2)
curprev 18:1618:16, 27 September 2013‎ Ningcao talk contribs‎ 301 bytes +60‎ →‎RIE 2 (MRC)

curprev 22:4922:49, 19 September 2013‎ Ningcao talk contribs‎ 241 bytes +1‎ →‎RIE 5 (PlasmaTherm)
curprev 22:4822:48, 19 September 2013‎ Ningcao talk contribs‎ 240 bytes 0‎ →‎GaN Etching (RIE#5)
curprev 22:4822:48, 19 September 2013‎ Ningcao talk contribs‎ 240 bytes −25‎ →‎RIE Etch 5 (RIE#5)
curprev 22:4722:47, 19 September 2013‎ Ningcao talk contribs‎ 265 bytes +111‎ →‎RIE 5 (PlasmaTherm)

curprev 13:3213:32, 17 August 2012‎ Zwarburg talk contribs‎ 154 bytes +12‎ No edit summary

curprev 17:3717:37, 18 July 2012‎ Zwarburg talk contribs‎ 142 bytes +142‎ Created page with "{{recipes}} =RIE 1 (Custom) = =RIE 2 (MRC) = =RIE 3 (MRC) = =RIE 5 (PlasmaTherm) = =Si Deep RIE (PlasmaTherm/Bosch Etch)="

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