Oxford ICP Etcher (PlasmaPro 100 Cobra): Revision history

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curprev 23:0423:04, 27 November 2024‎ Noahdutra talk contribs‎ 5,704 bytes +46‎ →‎GaN Etch (Cl2/BCl3/Ar/200°C): Added recipe name for GaN Tag: Visual edit
curprev 21:2221:22, 27 November 2024‎ Noahdutra talk contribs‎ 5,658 bytes +509‎ →‎GaN Etch (Cl2/BCl3/Ar/200°C) Tag: Visual edit

curprev 02:0002:00, 7 November 2024‎ John d talk contribs‎ m 5,149 bytes +226‎ →‎Process Control Data Tag: Visual edit: Switched
curprev 02:0002:00, 7 November 2024‎ John d talk contribs‎ 4,923 bytes +1,227‎ link to PC data Tag: Visual edit: Switched

curprev 06:3306:33, 5 May 2023‎ John d talk contribs‎ 3,696 bytes +93‎ →‎Documentation: mentioend travelers for etches Tag: Visual edit

curprev 17:4717:47, 30 August 2022‎ Silva talk contribs‎ 3,603 bytes +25‎ No edit summary

curprev 14:4214:42, 23 June 2022‎ John d talk contribs‎ 3,578 bytes +36‎ →‎Detailed Specifications: updated recipes available Tag: Visual edit

curprev 21:2121:21, 13 January 2022‎ John d talk contribs‎ 3,542 bytes +156‎ →‎Recipes: link to Process Control Data Tag: Visual edit

curprev 18:5918:59, 29 September 2021‎ John d talk contribs‎ 3,037 bytes +143‎ →‎Detailed Specifications: updated ICP/RF powers Tag: Visual edit
curprev 18:1918:19, 29 September 2021‎ John d talk contribs‎ 2,894 bytes +24‎ updates to allowed materials Tag: Visual edit
curprev 17:4517:45, 29 September 2021‎ John d talk contribs‎ 2,870 bytes +124‎ →‎Detailed Specifications: added image, notes on substrate materials "discuss with staff" Tag: Visual edit

curprev 22:0022:00, 3 September 2021‎ John d talk contribs‎ 2,746 bytes −28‎ →‎Recipes: corrected link to recipes Tag: Visual edit
curprev 20:3820:38, 3 September 2021‎ John d talk contribs‎ 2,774 bytes +2,774‎ first attempt at page

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