Template:Announcements: Revision history

6 July 2018

• curprev 17:2217:22, 6 July 2018 John d talk contribs 2,982 bytes −295 lab open
• curprev 15:2315:23, 6 July 2018 John d talk contribs 3,277 bytes +378 high humidity

4 July 2018

• curprev 05:5005:50, 4 July 2018 John d talk contribs m 2,899 bytes −112 deleted icp2

26 June 2018

• curprev 15:4615:46, 26 June 2018 John d talk contribs 3,011 bytes −111 ICP2 up

25 June 2018

• curprev 23:2323:23, 25 June 2018 John d talk contribs m 3,122 bytes 0 Update timestamp
• curprev 23:2023:20, 25 June 2018 John d talk contribs 3,122 bytes +124 ICP he
• curprev 17:0417:04, 25 June 2018 John d talk contribs 2,998 bytes −137 icp2 update

24 June 2018

• curprev 05:1905:19, 24 June 2018 John d talk contribs 3,135 bytes +236 icp2 vac error

20 June 2018

• curprev 22:0522:05, 20 June 2018 John d talk contribs 2,899 bytes +417 pecvd1 s/w upgrade
• curprev 20:3120:31, 20 June 2018 John d talk contribs m 2,482 bytes −361 delted old notes

16 June 2018

• curprev 00:2400:24, 16 June 2018 John d talk contribs 2,843 bytes −23 AFM up
• curprev 00:2300:23, 16 June 2018 John d talk contribs 2,866 bytes +135 IBD Update
• curprev 00:2200:22, 16 June 2018 John d talk contribs 2,731 bytes +197 RIE5 SiCl4 issue 5min max

15 June 2018

• curprev 22:0522:05, 15 June 2018 John d talk contribs 2,534 bytes +226 stepper 2 up
• curprev 22:0422:04, 15 June 2018 John d talk contribs m 2,308 bytes −367 PECVD2 deleted

12 June 2018

• curprev 23:1823:18, 12 June 2018 John d talk contribs m 2,675 bytes +21 pecvd2 retraining required
• curprev 23:1723:17, 12 June 2018 John d talk contribs 2,654 bytes −185 rie5 SiCl4 UP, deleted "lab open"

11 June 2018

• curprev 23:1423:14, 11 June 2018 John d talk contribs 2,839 bytes −583 lab reopened update, deleted DSE wafer removed

8 June 2018

• curprev 18:0718:07, 8 June 2018 John d talk contribs 3,422 bytes +266 afm down
• curprev 16:3316:33, 8 June 2018 John d talk contribs 3,156 bytes +9 dse update, up

7 June 2018

• curprev 22:3422:34, 7 June 2018 Thibeault talk contribs 3,147 bytes +90 No edit summary
• curprev 18:4618:46, 7 June 2018 John d talk contribs 3,057 bytes +12 less startling title for lab closed
• curprev 18:4518:45, 7 June 2018 John d talk contribs 3,045 bytes +489 lab shutdown Monday june 11
• curprev 00:1800:18, 7 June 2018 John d talk contribs 2,556 bytes +15 bench 7 heated bath update

6 June 2018

• curprev 21:2221:22, 6 June 2018 Thibeault talk contribs 2,541 bytes −107 No edit summary

5 June 2018

• curprev 21:3721:37, 5 June 2018 John d talk contribs 2,648 bytes −211 deleted rie5 broken wafer
• curprev 00:0000:00, 5 June 2018 John d talk contribs 2,859 bytes +40 RIE#5 SiCl4 update

4 June 2018

• curprev 23:5923:59, 4 June 2018 John d talk contribs 2,819 bytes +212 rie5 wafers in chamber
• curprev 18:0618:06, 4 June 2018 Thibeault talk contribs 2,607 bytes −101 No edit summary

31 May 2018

• curprev 00:2600:26, 31 May 2018 John d talk contribs 2,708 bytes +12 many updates

26 May 2018

• curprev 21:5221:52, 26 May 2018 Thibeault talk contribs 2,696 bytes −20 No edit summary
• curprev 18:0518:05, 26 May 2018 Thibeault talk contribs 2,716 bytes +200 No edit summary
• curprev 17:4117:41, 26 May 2018 Thibeault talk contribs 2,516 bytes +29 No edit summary
• curprev 17:4117:41, 26 May 2018 Thibeault talk contribs 2,487 bytes +168 No edit summary
• curprev 17:3817:38, 26 May 2018 Thibeault talk contribs 2,319 bytes −28 No edit summary

25 May 2018

• curprev 00:2700:27, 25 May 2018 Thibeault talk contribs 2,347 bytes −34 →Stepper #2: Up
• curprev 00:2500:25, 25 May 2018 Thibeault talk contribs 2,381 bytes −248 →PECVD#2: Open Soon

18 May 2018

• curprev 16:0916:09, 18 May 2018 John d talk contribs 2,629 bytes −238 fab open, maintenance complete

17 May 2018

• curprev 04:4004:40, 17 May 2018 John d talk contribs 2,867 bytes 0 rie5 date correction
• curprev 04:4004:40, 17 May 2018 John d talk contribs 2,867 bytes +166 RIE5 SiCl ETA

16 May 2018

• curprev 23:1923:19, 16 May 2018 John d talk contribs 2,701 bytes −124 stepper 2 up

15 May 2018

• curprev 23:4323:43, 15 May 2018 John d talk contribs 2,825 bytes +246 PECVD2 update
• curprev 23:4123:41, 15 May 2018 John d talk contribs 2,579 bytes +42 stepper 2 update

14 May 2018

• curprev 20:2520:25, 14 May 2018 John d talk contribs 2,537 bytes +386 exhaust shutdown
• curprev 18:4318:43, 14 May 2018 John d talk contribs 2,151 bytes −19 stepper 2 update

13 May 2018

• curprev 02:2302:23, 13 May 2018 John d talk contribs 2,170 bytes −316 stepper 2 down, deleted >1 week old annc.

10 May 2018

• curprev 23:3723:37, 10 May 2018 Thibeault talk contribs 2,486 bytes −404 deleted old messaged, updated PECVD2
• curprev 23:3423:34, 10 May 2018 Thibeault talk contribs 2,890 bytes −95 →PECVD#2: Down, Retraining required

30 April 2018

• curprev 22:0222:02, 30 April 2018 John d talk contribs 2,985 bytes +115 jeol up
• curprev 17:4717:47, 30 April 2018 John d talk contribs m 2,870 bytes 0 reorder