Lithography Recipes: Revision history

19 November 2019

• curprev 19:1519:15, 19 November 2019‎ John d talk contribs‎ 14,594 bytes +358‎ added ARC row with links to DSK & DUV42P Tag: Visual edit: Switched

8 October 2019

• curprev 23:0723:07, 8 October 2019‎ John d talk contribs‎ m 14,236 bytes +125‎ →‎Automated Coat/Develop System Recipes (S-Cubed Flexi): link to tool page Tag: Visual edit
• curprev 22:4922:49, 8 October 2019‎ John d talk contribs‎ 14,111 bytes +154‎ added S-Cubed coater section Tag: Visual edit

7 September 2019

• curprev 05:1805:18, 7 September 2019‎ John d talk contribs‎ m 13,957 bytes +1‎ →‎Lift-Off Techniques: fixed link

6 September 2019

• curprev 17:3017:30, 6 September 2019‎ John d talk contribs‎ 13,956 bytes −41‎ →‎Lift-Off Techniques: added links to wiki version of lift-off tutorial + DUV lift-off page Tag: Visual edit

5 July 2019

• curprev 18:5018:50, 5 July 2019‎ John d talk contribs‎ 13,997 bytes +4‎ →‎Chemicals Stocked + Datasheets: DSK-101 --> DSK-101-304 Tag: Visual edit

6 May 2019

• curprev 23:3323:33, 6 May 2019‎ John d talk contribs‎ 13,993 bytes −2‎ →‎Photolithography Recipes: UVN2300-->UVN Tag: Visual edit

14 March 2019

• curprev 17:1717:17, 14 March 2019‎ John d talk contribs‎ 13,995 bytes +158‎ →‎General Information: PR's - cleaned up/clarified. Tag: Visual edit
• curprev 17:1417:14, 14 March 2019‎ John d talk contribs‎ m 13,837 bytes +66‎ →‎General Information: minor formatting, check links to litho chemicals section Tag: Visual edit
• curprev 17:1017:10, 14 March 2019‎ John d talk contribs‎ 13,771 bytes −2‎ →‎Chemicals Available + Datasheets: changed name to Stocked
• curprev 17:1017:10, 14 March 2019‎ John d talk contribs‎ 13,773 bytes +13‎ →‎Chemical Datasheets: changed name to "Chemicals Available + Datasheets"

11 October 2018

• curprev 23:1623:16, 11 October 2018‎ Ningcao talk contribs‎ 13,760 bytes +2‎ →‎Holography Recipes

20 September 2018

• curprev 16:5516:55, 20 September 2018‎ Thibeault talk contribs‎ 13,758 bytes +4‎ →‎Chemical Datasheets: changed DS-K101 to reflect new product number

6 September 2018

• curprev 15:3615:36, 6 September 2018‎ Thibeault talk contribs‎ 13,754 bytes +52‎ →‎Chemical Datasheets: Added BCB rework doc from DOW to list

21 August 2018

• curprev 16:0216:02, 21 August 2018‎ Ningcao talk contribs‎ 13,702 bytes +30‎ →‎Holography Recipes

16 August 2018

• curprev 23:1223:12, 16 August 2018‎ Ningcao talk contribs‎ 13,672 bytes +64‎ →‎Holography Recipes
• curprev 23:0323:03, 16 August 2018‎ Ningcao talk contribs‎ 13,608 bytes −64‎ →‎Holography Recipes

13 July 2018

• curprev 15:1715:17, 13 July 2018‎ John d talk contribs‎ 13,672 bytes +92‎ →‎Photolithography Recipes: fixed links to Stepp3 pos PR Tag: Visual edit

18 May 2018

• curprev 15:3315:33, 18 May 2018‎ Ningcao talk contribs‎ 13,580 bytes +55‎ →‎Photolithography Recipes
• curprev 15:3215:32, 18 May 2018‎ Ningcao talk contribs‎ 13,525 bytes +55‎ →‎Photolithography Recipes
• curprev 15:1315:13, 18 May 2018‎ Ningcao talk contribs‎ 13,470 bytes 0‎ →‎Photolithography Recipes: adding recipe Tag: Visual edit

6 May 2018

• curprev 04:0704:07, 6 May 2018‎ John d talk contribs‎ 13,470 bytes 0‎ reorder - recipes at top

19 April 2018

• curprev 21:3421:34, 19 April 2018‎ Thibeault talk contribs‎ m 13,470 bytes +56‎ →‎Chemical Datasheets Tag: Visual edit

3 April 2018

• curprev 21:1821:18, 3 April 2018‎ Thibeault talk contribs‎ m 13,414 bytes −56‎ →‎Chemical Datasheets Tag: Visual edit
• curprev 21:1621:16, 3 April 2018‎ Thibeault talk contribs‎ m 13,470 bytes +7‎ →‎Chemical Datasheets Tag: Visual edit
• curprev 21:1421:14, 3 April 2018‎ Thibeault talk contribs‎ m 13,463 bytes −57‎ →‎Chemical Datasheets Tag: Visual edit

24 March 2018

• curprev 16:4216:42, 24 March 2018‎ John d talk contribs‎ 13,520 bytes +30‎ →‎Chemical Datasheets: added "AZ EBR". no link yet Tag: Visual edit

15 February 2018

• curprev 18:1918:19, 15 February 2018‎ John d talk contribs‎ 13,490 bytes +274‎ →‎Chemical Datasheets: explain Chemical Datasheets - lists chemicals availabel in lab Tag: Visual edit

8 September 2017

• curprev 18:3018:30, 8 September 2017‎ Thibeault talk contribs‎ 13,216 bytes +4‎ →‎Chemical Datasheets Tag: Visual edit: Switched
• curprev 18:2618:26, 8 September 2017‎ Thibeault talk contribs‎ 13,212 bytes −1‎ No edit summary Tag: Visual edit: Switched
• curprev 18:1818:18, 8 September 2017‎ Thibeault talk contribs‎ 13,213 bytes −71‎ →‎Chemical Datasheets
• curprev 18:1618:16, 8 September 2017‎ Thibeault talk contribs‎ 13,284 bytes +53‎ →‎Chemical Datasheets

5 September 2017

• curprev 17:1417:14, 5 September 2017‎ John d talk contribs‎ 13,231 bytes +2‎ →‎E-Beam Lithography Recipes: testing visual editor Tag: Visual edit: Switched

1 September 2017

• curprev 20:0520:05, 1 September 2017‎ John d talk contribs‎ 13,229 bytes +32‎ →‎General Information: linked to PR/EBL datasheet sec
• curprev 20:0320:03, 1 September 2017‎ John d talk contribs‎ m 13,197 bytes +11‎ →‎General Information: nanoimprinting recipes section title correctly
• curprev 20:0220:02, 1 September 2017‎ John d talk contribs‎ 13,186 bytes +6‎ →‎General Information: bolded "holography"
• curprev 20:0020:00, 1 September 2017‎ John d talk contribs‎ 13,180 bytes +573‎ →‎General Information: link to PhotoLitho recipes + equipment
• curprev 19:5619:56, 1 September 2017‎ John d talk contribs‎ 12,607 bytes +8‎ →‎Low-K Dielectric Recipes: added "Sppin-On" to title
• curprev 19:5519:55, 1 September 2017‎ John d talk contribs‎ 12,599 bytes +7‎ →‎Low-K Dielectric: added Recipes
• curprev 19:5519:55, 1 September 2017‎ John d talk contribs‎ 12,592 bytes +7‎ →‎Nanoimprinting: added recipes
• curprev 19:5419:54, 1 September 2017‎ John d talk contribs‎ 12,585 bytes +23‎ →‎Chemical Datasheets: BCB+SOG --> "Spin-On Dielectrics"
• curprev 16:5916:59, 1 September 2017‎ John d talk contribs‎ m 12,562 bytes −1‎ →‎Chemical Datasheets: extra ]
• curprev 16:5816:58, 1 September 2017‎ John d talk contribs‎ m 12,563 bytes +3‎ →‎Chemical Datasheets: formatting
• curprev 16:5816:58, 1 September 2017‎ John d talk contribs‎ 12,560 bytes +92‎ →‎Chemical Datasheets: 1165 --> Az NMP + link to Microchem page for NMP
• curprev 16:4816:48, 1 September 2017‎ John d talk contribs‎ m 12,468 bytes 0‎ →‎General Information: spelling
• curprev 16:4716:47, 1 September 2017‎ John d talk contribs‎ m 12,468 bytes +29‎ →‎Chemical Datasheets: comment on BCB/SOG for clarity/matching with earlier link text
• curprev 16:4516:45, 1 September 2017‎ John d talk contribs‎ 12,439 bytes +17‎ →‎General Information: BCB/SOG anchor link
• curprev 16:4516:45, 1 September 2017‎ John d talk contribs‎ 12,422 bytes +162‎ →‎General Information: added links to anchors
• curprev 16:3916:39, 1 September 2017‎ John d talk contribs‎ 12,260 bytes +340‎ →‎Chemical Datasheets: Added Anchors for every section
• curprev 16:3416:34, 1 September 2017‎ John d talk contribs‎ m 11,920 bytes 0‎ →‎General Information